Most of the conventional sensors used for measuring deformation, pressure, etc., use metal, ceramics, piezo, or the like. Many of them are very rigid, and when the object is deformed or when the pressure on the object changes currently, it is necessary to arrange a large number of sensors with different conditions side by side. However, it is still difficult to measure all changes over time. With the newly developed dielectric elastomer sensor, even a very thin (0.1–0.2 mm) elastomer thickness could be deformed in difficult environments (e.g., places with large temperature changes or large vibrations), and it would be possible to measure any pressure changes due to its deformation. By applying this sensor, it can be used as a position sensor (including a three-dimensional sensor) or an acceleration sensor, so that it could be applied to the control of the arms and legs of a robot, smart shoes, and the like.