Sensitivity Analysis of Lateral Field Excited Acoustic Wave Gas Sensors with Finite Element Method

Chen, Yung-Yu; Liu, Chih Chieh

doi:10.1143/jjap.50.07hd05

Cited by 4 publications

(2 citation statements)

References 11 publications

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“…where r is the density, F is the vector of static force, and T is the vector of stress tensor. The constitutive equation of solid mechanics can be derived by equations ( 1) and (2). It is as follows…”

Section: Theoretical Backgrounds and Structural Modelmentioning

confidence: 99%

“…With tremendous development of micro-and nanotechnology, film bulk acoustic resonator (FBAR) has been widely used in mobile communications. [1][2][3] The successes in the field of FBAR based on filters motivate researchers to explore these applications in sensors. 4 The use of FBAR in sensing applications is attractive because the high resonance frequency leads to the excellent sensitivity.…”

Section: Introductionmentioning

confidence: 99%

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A film bulk acoustic resonator pressure sensor based on lateral field excitation

Geng

et al. 2018

International Journal of Distributed Sensor Networks

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A high-sensitive thickness shear mode film bulk acoustic resonator pressure sensor based on lateral field excitation is designed with its structure simulated in environment of air and liquids. A finite element model of film bulk acoustic resonator pressure sensor structure is established to obtain frequency variation under different pressure conditions by parameter sweep method when the multi-physics fields are added to the model. The results of simulation show that the pressure sensor's resonance frequency is 2.114 GHz and pressure sensitivity is 1200 Hz/kPa in air. In liquid environment, film bulk acoustic resonator pressure sensor displays a pressure sensitivity of 325 Hz/kPa in ethanol, 475 Hz/kPa in deionized water, and 612.5 Hz/kPa in glycerol. This film bulk acoustic resonator pressure sensor has been proved to be highly sensitive both in air and liquid environment and has the potential to be used in biomedical applications.

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Section: Theoretical Backgrounds and Structural Modelmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A film bulk acoustic resonator pressure sensor based on lateral field excitation

Geng

et al. 2018

International Journal of Distributed Sensor Networks

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Quartz Resonator for Simultaneously Measuring Changes in the Mass and Electrical Resistance of a Polyaniline Film

et al. 2012

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A novel quartz resonator was developed to measure, simultaneously, changes in the mass and electrical resistance of a polyaniline film during the absorption of water vapor. Interdigitated gold electrodes were vacuum-deposited on the sensing surfaces of the quartz crystals, and polyaniline films were drop-cast on the electrodes used to measure the changes in the electrical resistance. Two symmetric semicircular gold electrodes were deposited on the bottom surface of the quartz crystal. These electrodes were used to measure the changes in the mass of absorbed water based on the changes in the resonance frequency. The simultaneous measurements of mass and electrical resistance shed light on the interactions between the water vapor and the polyaniline film. The resonator was exposed to various organic gases, including ethanol, acetone, or chloroform, and each gas was found to produce characteristic changes in the normalized electrical resistance.

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Characterization of Underwater Stability of Superhydrophobic Surfaces Using Quartz Crystal Microresonators

2014

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We synthesized porous aluminum oxide nanostructures directly on a quartz crystal microresonator and investigated the properties of superhydrophobic surfaces, including the surface wettability, water permeation, and underwater superhydrophobic stability. After increasing the pore diameter to 80 nm (AAO80), a gold film was deposited onto the AAO80 membrane, and the pore entrance size was reduced to 30 nm (AAO30). The surfaces of the AAO80 and AAO30 were made to be hydrophobic through chemical modification by incubation with octadecanethiol (ODT) or octadecyltrichlorosilane (OTS), which produced three different types of superhydrophobic surfaces on quartz microresonators: OTS-modified AAO80 (OTS-AAO80), ODT-modified AAO30 (ODT-AAO30), and ODT-OTS-modified AAO30 (TS-AAO30). The loading of a water droplet onto a microresonator or the immersion of a resonator into water induced changes in the resonance frequency that corresponded to the water permeation into the nanopores. TS-AAO30 exhibited the best performance, with a low degree of water permeation, and a high stability. These features were attributed to the presence of sealed air pockets and the narrow pore entrance diameter.

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Sensitivity Analysis of Lateral Field Excited Acoustic Wave Gas Sensors with Finite Element Method

Cited by 4 publications

References 11 publications

A film bulk acoustic resonator pressure sensor based on lateral field excitation

A film bulk acoustic resonator pressure sensor based on lateral field excitation

Quartz Resonator for Simultaneously Measuring Changes in the Mass and Electrical Resistance of a Polyaniline Film

Characterization of Underwater Stability of Superhydrophobic Surfaces Using Quartz Crystal Microresonators

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