Sensitivity Calculation of Piezoelectric Pressure Sensor Based on Aluminum Anodic Oxide Impregnated With Polymer

Abstract

The application of highly ordered thin ceramic coatings with nano-dimensional pores obtained by metal anodic oxidation in pressure sensors of a matrix type is promising. For this purpose the pores of a ceramic base are impregnated with polymer realizing a direct piezoelectric effect. 
 There is developed a procedure for the calculated definition of piezoelectric pressure sensor sensitivity which is a thin coating made of nano-porous aluminum anodic oxide the pores of which are filled with polyvinylidene fluoride. 
 The procedure is based on a three-phase model of fiber-reinforced composite and a simplified problem setting of electroelasticity. The sensor is modeled by a thin two-layer coating located on a conditionally non-deformable base. 
 It is defined that for a coating lying freely on a rigid foundation the sensitivity is directly proportional to volume fraction of the polymer filler. For a coating con-nected in an adhesion way with the base the sensitivity dependence upon a filler share is close to a quadratic one. The estimated assessments of sensor characteristics under analysis at different ways of fastening coincide at 58% volume content of polymer piezoelectric.