Sensitivity enhancement for micromechanical vibro‐impact resonators using snap‐through curved beams

Abstract

This work enhances the driving sensitivity of micromechanical vibro-impact resonators by reducing the output switching gap. Differing from previous works for gap narrowing that either require a dedicated pull-in bias voltage and stopper structures or post-fabrication refill processes, the use of the snap-through technique calls for only the initial activation step without the need for constantly applied voltage or additional process steps. Doing so realizes a final gap spacing from a typical 2-µm limitation to a 0.9-µm sub-micron gap. While probes are used to mechanically initiate the bistable transition in this proof-ofconcept demonstration, this could be done electrically once properly designed actuation electrodes are available. This transducer gap narrowing technique can help facilitate higher sensitivity for vibro-impact resonator embedded applications such as zero-quiescent power communication receivers.