Sensitivity enhancement of piezoresistive pressure sensor with meander shape piezoresistor

Meti, Shwetha; Balavalad, Kirankumar B.; Katageri, Ajayakumar C.; Sheeparamatti, B. G.

doi:10.1109/iceets.2016.7583874

Cited by 6 publications

(5 citation statements)

References 5 publications

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“…The connectors are fabricated using silicon material characterized by strong conductivity and a width of 5 mm. The connectors will not influence the piezoresistive effect due to its high conductivity (Meti et al, 2016b;Sabhapandit et al, 2023b). The three…”

Section: Resultsmentioning

confidence: 99%

Formulation analysis and follow-up study of multi-turn configuration for performance enhancement of MEMS piezoresistive pressure sensor utilized for low-pressure measurement applications

Kanekal,

Sabhapandit,

Jindal

et al. 2024

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Purpose The purpose of this research is to study the performance of piezoresistive pressure sensors using polysilicon as the piezoresistive material, which is typically used to measure pressure in high-temperature environments. Design/methodology/approach The performance of this sensor is enhanced by studying the influence of multi-turn configuration at which the piezoresistors are arranged. Different configurations are studied and compared by laying down their analytical solution. Findings The validation of analytical results is accomplished through finite element analysis using the software COMSOL Multiphysics. The best configuration, which uses a partial triple-turn configuration, was able to achieve a sensitivity of 116.00 mV/V/MPa over a simulated pressure range of 0 to 500 KPa. Originality/value The literature shows the study of single-turn and double-turn meander-shaped configuration of micro-electromechanical systems piezoresistive pressure sensor but multi-turn meander-shaped configuration using a square silicon diaphragm has not been reported. Its study has reflected promising results than its counterparts based on key performance parameters such as sensitivity and linearity and are more effective to be used for automotive, aviation, biomedical and consumer electronics applications.

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Section: Resultsmentioning

confidence: 99%

Formulation analysis and follow-up study of multi-turn configuration for performance enhancement of MEMS piezoresistive pressure sensor utilized for low-pressure measurement applications

Kanekal,

Sabhapandit,

Jindal

et al. 2024

View full text Add to dashboard Cite

show abstract

“…Thickness taken is very less as compared to twice of length and width is also very less as compared to length of the diaphragm (almost < 2 length). According to Hooks law, the stress component in X and Y direction is given by equation (7).…”

Section: Diaphragm Thicknessmentioning

confidence: 99%

“…Singh et al observed the effect of variable diaphragm thickness and positioning of piezoresistors to investigate the performance of the pressure sensor to overcome the effect of over and under etching in bulk micromachining during fabrication [6]. Ali et al reported the effect of varying diaphragm of pressure sensor for monitoring glaucoma disease [7]. Tang et al reported effect of different thickness of square and circular silicon diaphragm on diaphragm displacement and induced stress [8].…”

Section: Introductionmentioning

confidence: 99%

Multi objective design optimization of graphene piezoresistive MEMS pressure sensor using design of experiment

Nag

Pratap

Kumar

2022

Int. J. Simul. Multidisci. Des. Optim.

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This paper investigates the effect of diaphragm thickness, dimensions of piezoresistors, doping profile and temperature compatibility on sensitivity and non-linearity of graphene MEMS pressure sensor. Taguchi method is used for maximizing the sensitivity and minimizing the nonlinearity of the designed pressure sensor. L27 orthogonal array is utilized for five input factors with three levels. Output voltage is obtained from simulation in COMSOL for different combinations of the input parameters as per L27 orthogonal array. It was found that diaphragm thickness and length of the sensing element shows maximum contribution in increasing the sensitivity of the pressure sensor. Similarly, interaction of diaphragm thickness with piezoresistors thickness and doping concentration shows a major contribution in reducing the non-linearity of the pressure sensor. Other factors such as operating temperature affects both sensitivity and nonlinearity of the pressure sensor with a very low contributing percentage of 0.40% and 2.16%, respectively. Pareto Analysis of variance (ANOVA) was employed to validate the predicated results of the designed pressure sensor. The result indicated that the optimum design shows a sensitivity of 4.10 mV/psi with very low non linearity of 0.1%.

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“…In this section, we shall discuss the role of advanced coal-fired power plants in Japan in terms of economic competitiveness and energy security. Reserves of the coal are distributed over a wide regions and countries: It has been reported that 27.6 % of recoverable reserves of the coal is located in U.S., 18.2 % in Russia, 17.1 % in European regions, 13.3 % in China, 8.9 % in Australia, 7.0 % in India, and 7.9 % in other countries in 2010 10) , and notably 74.3 % of the coal in Japan was imported from Australia, 12.9 % from Indonesia, 8.7 % from Russia, and 4 % from other countries in 2014 11) . The unbiased distribution is thus an advantage for Japan to avoid geopolitical risks and stably supply the resource to domestic consumers.…”

Section: Role Of the Advanced Coal-fired Power Plants In The Energy Smentioning

confidence: 99%

Developments of Coal-Fired Power Plants : Microscopy Study of Fe-Ni Based Heat-Resistant Alloy for Efficiency Improvement

Akamine¹,

Mitsuhara²,

Nishida³

2016

Evergreen

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Anthropogenic emissions of greenhouse gases are one of the possible reasons for the global warming. Coal consumption is predicted to be increased over several decades due to increasing demands in some countries. In the medium-term energy strategy, coal-fired power plants thus need to be developed. For this purpose, developments of new heat-resistant alloys that can stand severe steam conditions in advanced power plants are essential. A potential alloy was studied, which revealed that hardness of the alloy is related to the distribution of precipitates. The development of the alloy is also vital to make the power plants more economically competitive.

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Sensitivity enhancement of piezoresistive pressure sensor with meander shape piezoresistor

Cited by 6 publications

References 5 publications

Formulation analysis and follow-up study of multi-turn configuration for performance enhancement of MEMS piezoresistive pressure sensor utilized for low-pressure measurement applications

Formulation analysis and follow-up study of multi-turn configuration for performance enhancement of MEMS piezoresistive pressure sensor utilized for low-pressure measurement applications

Multi objective design optimization of graphene piezoresistive MEMS pressure sensor using design of experiment

Developments of Coal-Fired Power Plants : Microscopy Study of Fe-Ni Based Heat-Resistant Alloy for Efficiency Improvement

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