2014
DOI: 10.1109/tcst.2014.2303486
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Sensorless Implementation of a PPF Controller for Active <inline-formula> <tex-math notation="TeX">$Q$ </tex-math></inline-formula> Control of an AFM Microcantilever

Abstract: Abstract-Reducing the cantilever quality ( Q) factor in the atomic force microscope (AFM), when operating in tapping mode, allows for an increase in imaging speed. Passive piezoelectric shunt control has several advantages over alternative methods of cantilever Q factor reduction. However, this technique uses a passive electrical impedance to modify the mechanical dynamics of the cantilever, which limits the amount of Q factor reduction achievable. This paper demonstrates that further reductions in the cantile… Show more

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Cited by 11 publications
(5 citation statements)
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“…unless x k = 0. In the case that x k = 0, we also have x k = 0 according to (43). Hence, the system state already stays at the equilibrium at the origin.…”
Section: Discrete-time Integral Resonant Controllermentioning
confidence: 98%
See 1 more Smart Citation
“…unless x k = 0. In the case that x k = 0, we also have x k = 0 according to (43). Hence, the system state already stays at the equilibrium at the origin.…”
Section: Discrete-time Integral Resonant Controllermentioning
confidence: 98%
“…Several popular SNI controllers, including the positive position feedback (PPF) controller [38]- [43], the resonant controller (RC) [13], [14], [44], [45], and the integral resonant controller (IRC) [6], [46]- [48], have been implemented successfully. These controllers are not only easy to implement but also highly effective in terms of providing robust damping, especially when dealing with uncertainties in resonance frequency [38].…”
Section: Introductionmentioning
confidence: 99%
“…To increase the scanning speed of an AFM by reducing the cantilever's Q factor, an active impedance in the piezoelectric shunt control framework is proposed in [126]. By using this technique, scans are obtained on a 10 µm × 10 µm section of a calibration grating at a scanning speed of 60 µm/s.…”
Section: ) Compensate the Limitation Of Probementioning
confidence: 99%
“…Here, a force proportional to the oscillation velocity of the beam was applied to the sensor. Although measuring velocity [ 27 , 38 ] is preferable, methods based on measuring deflection, such as differentiation [ 13 ], phase-shifting [ 20 ], time delay [ 16 ], resonant control [ 22 ], observer-based control [ 39 ], and positive position feedback [ 24 , 26 ], are also viable. In general, the effectiveness of closed-loop Q control decreases with the increasing integration level of the sensor.…”
Section: Introductionmentioning
confidence: 99%