Sensors and Actuators on CMOS Platforms

Lantz, Mark A.; Hagleitner, Christoph; Despont, M.; Vettiger, P.; Cortese, Mario; Vigna, Benedetto

doi:10.1007/978-0-387-75593-9_5

Cited by 2 publications

(3 citation statements)

References 121 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Biofunctionalized impedance-based biosensors are among the most widely used sensors for the detection of bacteria [ 31 ]. The sensing part of the impedance biosensor consists of a relatively simple and well-studied structure as interdigitated electrodes (IDE) [ 32 ]. They are patterned on a metal thin film, processed on silicone die using CMOS or MEMS processing platform.…”

Section: Biosensor Technologymentioning

confidence: 99%

“…In the first group, IDE are fixed and have no any degree of movement. In the second group [ 32 ], one set of the comb electrodes is fixed, whereas a complimentary set of comb electrodes has a certain freedom of movement that is defined and controlled by a spring suspension. The freedom of movement for the other set of comb electrodes extends its application area to sensing of movements, accelerations, inclination and pressure.…”

Section: Biosensor Technologymentioning

confidence: 99%

See 1 more Smart Citation

Device Processing Challenges for Miniaturized Sensing Systems Targeting Biological Fluids

Stoukatch

Dupont

Redouté

2022

Biomedical Materials & Devices

View full text Add to dashboard Cite

This article presents a review of device processing technologies used in the fabrication of biomedical systems, and highlights the requirements of advanced manufacturing technology. We focus on biomedical systems that perform diagnostics of fluidic specimens, with analytes that are in the liquid phase. In the introduction, we define biomedical systems as well as their versatile applications and the essential current trends. The paper gives an overview of the most important biomolecules that typically must be detected or analyzed in several applications. The paper is structured as follows. First, the conventional architecture and construction of a biosensing system is introduced. We provide an overview of the most common biosensing methods that are currently used for the detection of biomolecules and its analysis. We present an overview of reported biochips, and explain the technology of biofunctionalization and detection principles, including their corresponding advantages and disadvantages. Next, we introduce microfluidics as a method for delivery of the specimen to the biochip sensing area. A special focus lies on material requirements and on manufacturing technology for fabricating microfluidic systems, both for niche and mass-scale production segments. We formulate requirements and constraints for integrating the biochips and microfluidic systems. The possible impacts of the conventional microassembly techniques and processing methods on the entire biomedical system and its specific parts are also described. On that basis, we explain the need for alternative microassembly technologies to enable the integration of biochips and microfluidic systems into fully functional systems.

show abstract

Section: Biosensor Technologymentioning

confidence: 99%

Section: Biosensor Technologymentioning

confidence: 99%

Device Processing Challenges for Miniaturized Sensing Systems Targeting Biological Fluids

Stoukatch

Dupont

Redouté

2022

Biomedical Materials & Devices

View full text Add to dashboard Cite

show abstract

“…This microdevice distribution (MD) technology combines some of the cost efficiency of pickand-place or device-level assembling with the high level of integration offered by wafer-level techniques. In applications involving large differences in die size, wafer-level integration has a large cost penalty that makes it difficult to compete against the better-established pick-and-place technology or, if the process allows it, monolithic integration [16]. Indeed, a key prerequisite for wafer-level integration is that the chip or device to be transferred and the corresponding receiver die must have the same pitch on their respective wafers.…”

Section: Introductionmentioning

confidence: 99%

Low-cost AFM cantilever manufacturing technology

Guerre¹,

Drechsler²,

Jubin³

et al. 2008

J. Micromech. Microeng.

View full text Add to dashboard Cite

In this paper, we present a method for reducing the fabrication cost of AFM cantilevers drastically. The manufacturing process is based on a generic technique for heterogeneous device integration and interconnects at wafer-scale level called 'microdevice distribution' technology, which relies on the selective transfer of microdevices to distribute them from one wafer to many. The cost reduction is achieved by using a low-cost method for distributing the expensive high-quality part consisting of the cantilever beam with its tip to a low-cost, prefabricated substrate containing the handling body of the AFM chip. The distribution method relies on selective bonding using an adhesive polymer layer and device release based on laser ablation. For this demonstration, a distribution ratio of 42 has been chosen (42 receiver wafers populated with one source wafer), but much higher distribution ratios are also possible. Two different types of receiver wafers containing the chips body have been investigated: one is a prediced silicon wafer and the other a patterned photoplastic wafer. To enable the transfer onto a prestructured device, the method has been optimized for free-standing device transfer. A stamping method using a 3D stamp has also been investigated as a low-cost process for defining the selection adhesive pad. The cost-reduction method proposed is generic and can be applied to many different types of microdevice fabrication.

show abstract

Sensors and Actuators on CMOS Platforms

Cited by 2 publications

References 121 publications

Device Processing Challenges for Miniaturized Sensing Systems Targeting Biological Fluids

Device Processing Challenges for Miniaturized Sensing Systems Targeting Biological Fluids

Low-cost AFM cantilever manufacturing technology

Contact Info

Product

Resources

About