1995
DOI: 10.1016/0924-4247(95)00846-2
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Sensors based on piezoelectric resonators

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Cited by 293 publications
(116 citation statements)
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“…This effect has been used to make mass sensors for measuring the density and thickness of the layer. These mass sensors are called quartz crystal microbalances (QCMs) and have important applications in monitoring thin film deposition and in chemical and biological sensing [6].…”
Section: Introductionmentioning
confidence: 99%
“…This effect has been used to make mass sensors for measuring the density and thickness of the layer. These mass sensors are called quartz crystal microbalances (QCMs) and have important applications in monitoring thin film deposition and in chemical and biological sensing [6].…”
Section: Introductionmentioning
confidence: 99%
“…For example, most film-coated QCM devices must have specified dimensions so that a resonant bulk acoustic wave Sensors and Actuators B 82 (2002) can be maintained in the quartz crystal transducer element [15,16]. Similarly, the geometry of SAW devices is constrained by the need to sustain a Rayleigh wave of the appropriate resonant frequency at the surface of the transducer crystal [15]. Each detector in a QCM or SAW array typically has an identical area and form factor; consequently, the array response is based solely on the different polymer/analyte sorption properties of the differing detector films.…”
Section: Introductionmentioning
confidence: 99%
“…These papers reviewed piezoelectric sensors based on quartz crystals and lead-based ceramics [6,16,17], and the key features of well-known piezoelectric sensor designs were introduced as well as the associated applications. Typical sensor configurations such as piezoelectric bars, disks, cylinders, spheres, and benders were studied for hydrophones, accelerometers, and bio-sensors [17].…”
mentioning
confidence: 99%