Separating InGaN membranes from GaN/sapphire templates through a crystallographic-etch-limited process

Jiang, Ren-Hao; Lin, Chia−Feng; Huang, Yu-Chieh; Fan, Feng-Hsu; Wu, Kuo‐Hui; Wang, Jing-Hao; Cheng, Po-Fu; Yang, Chou-Chen

doi:10.1039/c3ra41811a

Cited by 5 publications

(2 citation statements)

References 26 publications

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“…Non-contact avoids direct contact with the processing material caused by stress influence and impurity doping; Without any chemical corrosives, it has the advantages of environmental protection and green and has incomparable advantages in material removal with other traditional methods (mechanical milling, wet etching, dry etching and lithography, etc.) [14][15][16][17] .…”

Section: Introductionmentioning

confidence: 99%

Research on laser selective intelligent processing based on coaxial spectral monitoring

Yang

Xiong

Deng

2022

Advanced Laser Processing and Manufacturing VI

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To address the problem of directional selective removal of multilayer composite heterogeneous materials, an integrated processing and detection system based on galvanometer scanning processing and coaxial spectral monitoring was proposed. Combining laser processing and spectral detection technology, aiming at the selective removal of FR-4 multilayer composite copper clad laminate (CCL), the influence rules between material interface and characteristic spectrum, characteristic spectrum intensity ratio and residual rate, spectral signal-to-noise ratio and energy density were systematically explored. The spectral criterion of laser selective processing was established based on the residual rate index, which realizes the patterned precision processing copper layer, and simultaneously realizes the in-situ online analysis and two-dimensional to three-dimensional mapping characterization of the composition and content of the processed materials, the coordinated regulation mechanism of real-time online monitoring and element closed-loop feedback was established.

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Section: Introductionmentioning

confidence: 99%

Research on laser selective intelligent processing based on coaxial spectral monitoring

Yang

Xiong

Deng

2022

Advanced Laser Processing and Manufacturing VI

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“…Several approaches have presented flexible lightemitting diodes (F-LEDs) by transferring microstructured GaAs/GaN to flexible substrates [7][8][9][10]. And the majority methods have produced flexible and highly efficient thin film GaN-based LEDs by laser lift-off (LLO) technology [11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of GaN-Based White Light-Emitting Diodes on Yttrium Aluminum Garnet-Polydimethylsiloxane Flexible Substrates

Chen

Lin

2015

Advances in Materials Science and Engineering

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This study concerns the characteristics of white GaN-based light-emitting diode (LED) on flexible substrates. The thin film GaN-based blue LEDs were directly transferred from sapphire onto the flexible polydimethylsiloxane (PDMS) substrates by laser lift-off (LLO) process. The PDMS substrates were incorporated 10–40% cerium doped yttrium aluminum garnet phosphor, YAG:Ce3+, and formed the GaN-based white LEDs. The white LEDs prepared by the GaN-based LEDs on the YAG-PDMS substrates reveal one peak at 470 nm corresponding to the emission of the GaN-based LED and a broadband included five weak peaks caused by YAG:Ce3+phosphors.

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III-nitride semiconductor membrane electronics and optoelectronics for heterogeneous integration

Chen,

Song,

et al. 2024

Progress in Quantum Electronics

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Separating InGaN membranes from GaN/sapphire templates through a crystallographic-etch-limited process

Cited by 5 publications

References 26 publications

Research on laser selective intelligent processing based on coaxial spectral monitoring

Research on laser selective intelligent processing based on coaxial spectral monitoring

Fabrication of GaN-Based White Light-Emitting Diodes on Yttrium Aluminum Garnet-Polydimethylsiloxane Flexible Substrates

III-nitride semiconductor membrane electronics and optoelectronics for heterogeneous integration

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