Separation of sample geometry and material effects within the secondary electron cascade: Preliminary results for gold

Crone, M.; Barkshire, I. R.; Prutton, M.

doi:10.1002/sia.740211111

Surface & Interface Analysis

1994

DOI: 10.1002/sia.740211111

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Separation of sample geometry and material effects within the secondary electron cascade: Preliminary results for gold

M. Crone¹,

I. R. Barkshire²,

M. Prutton³

Abstract: Experimental results are reported for the energy-analysed angular distributions of the secondary electron cascade with energies from 200 eV up to 2450 eV using an incident beam energy of 20 keV and samples of Au and Au on Si. These. angular distributions are compared to those of the Auger electron emis9ion of the same samples. The dependence of the shape of the secondary electron cascade on the angle of incidence and the take-off angle to the analyser is examined. In the case of Au, the results are reported fo… Show more

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Cited by 7 publications

References 14 publications

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Spectrum Synthesis Based on Non-linear Addition

Bakush

Gomati

1996

Surf. Interface Anal.

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One of the proposed approaches in the literature for quantitative analysis in AES is the linear addition of elementalspectra acquired in the direct energy mode (N(E) vs.E andE·N(E) vs.E). Quantification is then achieved by matching the shape of the added spectra to that of an unknown that was also collected under identical experimental conditions. However, it is shown here that the linear combination of elemental spectra employed in this approach has no real justification in theory. Any agreement with experiment found using this approach can therefore be of doubtful value. To avoid uncertainty, non‐linear addition formulae that take the matrix effects (of the substrate) into consideration are developed. Results obtained with these formulae on AuCu alloys are described. The observed success of the linear addition is explained in terms of more rigorous non‐linear addition.

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Spectrum Synthesis Based on Non-linear Addition

Bakush

Gomati

1996

Surf. Interface Anal.

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Estimation of Excitation Depth Distribution from Electron-excited Auger Spectra of Iron Using Peak Shape Analysis

Fujita¹,

Schleberger²,

Tougaard³

1996

Surf. Interface Anal.

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We have studied the dependence of the Auger peak shape on primary electron energy for polycrystalline iron and have succeeded in extracting information about the excitation depth distribution. Iron LMM spectra were measured with different incident primary energies (1.25–4.00 keV) and the reflection electron energy‐loss spectroscopy (REELS) spectrum was measured at an energy of 0.7 keV corresponding to the average Fe LMM Auger energy. In the inelastic background analysis, we approximated the depth distribution functionf(x) of emitting atoms as a rectangular or an exponential decay model. Using the inelastic scattering cross‐section from REELS, the analysis separated the spectra into the intrinsic Auger spectra and the inelastic peak backgrounds corresponding to thef(x) at each incident energy. It was found that the exponential model was a more suitable model forf(x) than the rectangular model. The exponential decay length of excitation for Auger electrons was found to increase significantly as the primary energy increased.

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New technique for the simultaneous correction of topographical and backscattering artefacts in electron‐excited Auger spectroscopy and microscopy

Crone

Barkshire

Prutton

1994

Surface & Interface Analysis

Self Cite

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In order to relate an Auger signal to the atomic concentration in the surface of a solid, it is well known that corrections have to be made for matrix effects. Also, corrections may be needed to compensate for the effects of artefacts caused by properties of the sample other than the concentration of different elements. Large artefacts can be caused by the surface topography and subsurface composition variations often present in 'real' samples. This paper reports a new correction scheme that enables the quantitative analysis of samples with a structure for which no prior knowledge exists. The scheme uses the ratio of the Auger peak height to a background count rate above the energy of all significant Auger features, combined with a linear correction involving the atomic number of the substrate and the Auger backscattering factor. Inhomogeneous samples with angle of incidence variations from 0 O to 45" and an arbitrary atomic number can be analysed with an accuracy of -5 at.% using this method. Limitations exist for thin unsupported films.

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Separation of sample geometry and material effects within the secondary electron cascade: Preliminary results for gold

Cited by 7 publications

References 14 publications

Spectrum Synthesis Based on Non-linear Addition

Spectrum Synthesis Based on Non-linear Addition

Estimation of Excitation Depth Distribution from Electron-excited Auger Spectra of Iron Using Peak Shape Analysis

New technique for the simultaneous correction of topographical and backscattering artefacts in electron‐excited Auger spectroscopy and microscopy

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