Since the basic binding unit of current service request and response schema is an atomic Web service, it needs to costly find a substitute service or reconstruct the service process in the original service space once a fine granular evolution requirement occurs. To reduce the complexity of fine granular service evolution, an isomorphic evolution mechanism based on service clusters is proposed. Searching space can be reduced and responding flexibility will also be improved by adopting service cluster as the unit of service response. Simple evolution and merging evolution were put forward to handle the evolution of atomic Web services. Meanwhile, a formal model and the quality computing method for service processes built by service clusters were presented based on the logic Petri nets. Two types of evolution patterns including dot isomorphic evolution and chain isomorphic evolution were proposed to evolve service processes. The algorithms for different isomorphic evolution patterns of atomic service and service processes were designed in the paper. Simulation experiments were conducted on 10000 Web services with different process patterns. Compared with the traditional service request and response schema, the efficiencies of service discovery and isomorphic evolution are improved greatly in our proposed method.