Setting performance targets in a 300 mm wafer fabrication facility

Abstract

time that can be spent on leaming the new processes. A Evaluation of fab performance during the ramp-up phase is important since sufficient time should be allowed to develop processes with the designed specifications while productivity has to be maintained at a desired level to meet the ramp schedule. Setting targets for production in such an environment is an important task. Daily production targets help answer the question of whether the fab is performing as well as it should be, given the operating conditions. In this paper, we address the issue of calculating productivity and WIP targets to measure production performance given the fact that the fab is in a ramp mode. Since historical data and reliable bencbmarks are not currently available to compare 3 0 0 " fab performance measures, we developed a method for setting production targets. This paper describes the fab performance measuresproductivity, work in process m) and cycle timebeing used to track progress, a methodology to set targets for these measures and the implementation of the methodology using the advanced real time vacking and reporting tools available. The methodology developed is general enough that it can be used to set production targets in fabs which are not in the ramp-up phase.

Operations Management in Automated Semiconductor Manufacturing With Integrated Targeting, Near Real-Time Scheduling, and Dispatching

“…This approach effectively breaks the problem down into manageable chunks that can be solved independently but are tightly linked. While there exists considerable literature on semiconductor production scheduling and dispatching as noted above, there is limited work on targeting [1], [8] which is critical to solving the end-to-end semiconductor manufacturing work-in-process (WIP) operations management problem.…”

Heuristic Algorithm for a WIP Projection Problem at Finite Capacity in Semiconductor Manufacturing

“…In the literature, there are few studies considering the WIP projection problem in the semiconductor industry ( [46], [47], [48]). In these works, authors consider different objectives and do not take into account all the cited constraints.…”

“…Lee et al [47] employed deterministic linear programming techniques for the WIP projection problem in the wafer fab, that explicitly considers the variable cycle time. Govind and Fronckowiak [48] consider WIP projection problem to measure production performance at IBM's 300 mm wafer fab by computing productivity and WIP targets at infinite capacity. As one can see, even if some papers tackle similar planning problems, none of the already proposed models explicitly address our specific problem.…”