2015
DOI: 10.1002/pssb.201552619
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Seven‐inch large‐size synthesis of monolayer hexagonal BN film by low‐pressure CVD

Abstract: We report the large-size synthesis of atomic monolayer hexagonal boron nitride (h-BN) film on flexible Cu foil by a low-pressure chemical vapor deposition (CVD) method. The borazane powder was used as the precursor carried by mixed hydrogen/argon gases. By rolling the Cu foil substrate into a cylindrical shape, wafer-scale monolayer h-BN film has been achieved at a size over 7 in. With the aid of PMMA, the h-BN monolayer was transferred onto a 4 00 Si wafer for characterization and further electrical applicati… Show more

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Cited by 15 publications
(10 citation statements)
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“…By transferring the h-BN layer on a Si substrate assisted by poly­(methyl methacrylate) (PMMA), Raman spectra were recorded and shown in Figure S2b. The characteristic peak located at ∼1372 cm –1 confirmed the monolayer of h-BN film. , The LPCVD system for h-BN coating on Cu NWs was setup as schematically shown in Figure a, and the processes of encapsulation were conducted as follows. First, the Cu NW was imprinted onto target substrates such as quartz glass or sapphire and placed side-by-side with the borazane precursor in a quartz boat.…”
Section: Results and Discussionmentioning
confidence: 99%
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“…By transferring the h-BN layer on a Si substrate assisted by poly­(methyl methacrylate) (PMMA), Raman spectra were recorded and shown in Figure S2b. The characteristic peak located at ∼1372 cm –1 confirmed the monolayer of h-BN film. , The LPCVD system for h-BN coating on Cu NWs was setup as schematically shown in Figure a, and the processes of encapsulation were conducted as follows. First, the Cu NW was imprinted onto target substrates such as quartz glass or sapphire and placed side-by-side with the borazane precursor in a quartz boat.…”
Section: Results and Discussionmentioning
confidence: 99%
“…In principle, several crucial issues should be addressed: (1) difficulty in obtaining full coverage of the coating layer, (2) well-conjugated core–shell structure, and (3) inherent invulnerable shell materials. Recently, hexagonal boron nitride (h-BN), one of the prominent members of two-dimensional (2D) materials, has attracted enormous attention due to its excellent properties such as high mechanical strength, high thermal conductivity, planar honeycomb structure, and atomic thickness/smoothness. The atomic honeycomb structure is constructed by the strong covalent bonds of boron and nitrogen atoms, which can effectively resist the penetration of gas or liquid molecules . As a result, its excellent chemical stability and antioxidant ability under high temperature (∼800 °C) are even superior to GR. , Previous reports have shown the encapsulation of h-BN shells on metallic nanoparticles and NWs.…”
mentioning
confidence: 99%
“…The detailed fabrication processes can be found in a previously published paper . Monolayer hBN was synthesized on copper foils using a low-pressure CVD system at 1050 °C with pressure <10 –4 Torr following the reported studies . The grown hBN was then transferred onto n-Al 0.4 Ga 0.6 N by applying a PMMA-based wet chemical etching process.…”
Section: Methodsmentioning
confidence: 99%
“…3.2.1 Solid Cu catalyst. In general, the precursors of growing h-BN range from gas to liquid to solid, such as diborane, 72 ammonia, borazine, 73,74 ammonia borane and others. Among them, solid ammonia borane was the most popular precursor in most cases.…”
Section: Hexagonal Boron Nitridementioning
confidence: 99%