Shape effects of micromechanical cantilever sensor

Hocheng, H.; Weng, Wen Hsin; Chang, J.H.

doi:10.1016/j.measurement.2012.05.007

Cited by 13 publications

(5 citation statements)

References 19 publications

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“…A cantilever acts as a mass sensor when it is operated at its resonance frequency, as any mass change on the cantilever will cause a shift in the resonance frequency. For bio-sensing applications, several types of cantilevers have been tested [20], of which cantilevers with a rectangular cross section are the simplest and most commonly used. The relation between the resonance frequency and the mass of the rectangular cantilever is found by solving the Euler-Bernoulli beam equation (in vacuum condition), with suitable approximations and proper boundary conditions [16].…”

Section: Theorymentioning

confidence: 99%

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Measurement and reliability issues in resonant mode cantilever for bio-sensing application in fluid medium

Kathel

Shajahan

Bhadra

et al. 2016

J. Micromech. Microeng.

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Cantilevers immersed in liquid experience viscous damping and hydrodynamic loading. We report on the use of such cantilevers, operating in the dynamic mode with, (i) frequency sweeping and (ii) phase locked loop methods. The solution to reliability issues such as random drift in the resonant peak values, and interference of spurious modes in the resonance frequency spectrum, are explained based on the actuation signal provided and laser spot size. The laser beam spot size and its position on the cantilever were found to have an important role, on the output signal and resonance frequency. We describe a method to distinguish the normal modes from the spurious modes for a cantilever. Uncertainties in the measurements define the lower limit of mass detection (mmin). The minimum detection limits of the two measurement methods are investigated by measuring salt adsorption from phosphate buffer solution, as an example, a mass of 14 pg was measured using the 14th transverse mode of a m × 100 μm × 1 μm silicon cantilever. The optimized measurement was used to study the interaction between antibody and antigen.

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Section: Theorymentioning

confidence: 99%

“…We also derive suitable values for the proportional (P) and integral (I ) gain used to attain a stable baseline for PLL tracking. The steps taken to achieve repeatable and reliable results, in terms of the minimum limit of detection or resolution of an oscillation mode [20], with a cantilever based biosensor, are highlighted.…”

Section: Introductionmentioning

confidence: 99%

Measurement and reliability issues in resonant mode cantilever for bio-sensing application in fluid medium

Kathel

Shajahan

Bhadra

et al. 2016

J. Micromech. Microeng.

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“…This layer avoided channeling effects during the boron implantation and led to a very thin doped region. Boron fluorine was then implanted with an energy of 15 keV and a dose of 1 × 10 16 ions/cm 2 . Owing to the heavier mass of the BF3 molecules relative to boron, the use of BF3 resulted in a thickness reduction of the p + -doped region.…”

Section: Microcantilever Fabricationmentioning

confidence: 99%

“…Therefore, the majority of the studies conducted in order to improve the mass sensitivity of cantilevers are focusing on increasing the stiffness (k) and/or decreasing the effective mass (meff) using different methods. H. Hocheng et al [16] have demonstrated using different microcantilever shapes that the higher the structural stiffness is, the better the sensitivity is. Similarly, S. Subramanian et al [17] suggested the use of a nonlinear width profile for V-shaped microcantilevers in order to increase the structural stiffness and subsequently the mass sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Geometry optimization of uncoated silicon microcantilever-based gas density sensors

Boudjiet

Bertrand

Mathieu

et al. 2015

Sensors and Actuators B: Chemical

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Abstract:In the absence of coating, the only way to improve the sensitivity of silicon microcantilever-based density sensors is to optimize the device geometry. Based on this idea, several microcantilevers with different shapes (rectangular-, U-and T-shaped microstructures) and dimensions have been fabricated and tested in the presence of hydrogen/ nitrogen mixtures (H2/N2) of various concentrations ranging from 0.2% to 2%. In fact, it is demonstrated that wide and short rectangular cantilevers are more sensitive to gas density changes than U-and T-shaped devices of the same overall dimensions, and that the thickness doesn't affect the sensitivity despite the fact that it affects the resonant frequency. Moreover, because of the phase linearization method used for the natural frequency estimation, detection of a gas mass density change of 2 mg/l has been achieved with all three microstructures. In addition, noise measurements have been used to estimate a limit of detection of 0.11 mg/l for the gas mass density variation (corresponding to a concentration of 100 ppm of H2 in N2), which is much smaller than the current state of the art for uncoated mechanical resonators.

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“…With the rise in applications of cantilever‐based sensors (either with vertically or horizontally oriented microcantilevers) in various point‐of‐care devices, improving the performance, sensitivity, response time, and robustness have become areas of active research as discussed by Calleja et al 33 It is generally known that the performance indicators of the sensors are affected by geometric, materials, actuation mechanism and fabrication factors 36 . Technical suggestions for performance improvement have therefore ranged from the recommendation of using higher‐order vibration mode, 37 through taking advantage of shape effects, 38 employing stepped microcantilever, 39 to the use of optimized cross‐sectional profile 40 . Recently, coupling of the resonant behavior of micropillar arrays with other resonators has also been observed to yield enhanced performance for mass‐sensitive biosensors.…”

Section: Introductionmentioning

confidence: 99%

Modeling and analysis of nature‐inspired branched micropillars for enhanced dynamic bio‐sensing

Mustapha

Hawwa

Abakr

2021

Numer Methods Biomed Eng

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Research evidence abounds on the effectiveness of micropillar‐based microelectromechanical systems for the detection of a wide variety of ultrasmall biological objects for clinical and non‐clinical applications. However, the standard micropillar‐based sensing platforms rely on a single‐column micropillar with a spot at the tip for binding of objects. Although this long‐standing form has shown immense potential, performance improvement is hindered by the fundamental limits enforced by physical laws. Moreover, the single‐column micropillar has a lower sensing area and is ill‐suited for a simultaneous differential sensing of chemical/biological objects of different mass. Here, we report a new set of nature‐inspired, branched micropillar‐based sensing resonators to address the highlighted issues. The characteristics of the newly proposed branched micropillars are comprehensively examined with three payloads (Bartonella Bacilliformis, Escherichia coli, and Micro magnetic beads). Anchored on the capability of continuum theoretical framework, the mathematical model of the micropillar is formulated through the synthesis of the modified couple stress, the Rayleigh‐Love, and the Timoshenko theories. The finite element method is employed to shed light on the variability of the structures' resonant response under performance reduction factors (payload's rotary inertia, damaged substrate, and density of a surrounding fluid). The results obtained indicate superior performance indicators for the triply‐branched micropillar: enhanced response sensitivity for multiple payloads and less susceptibility to deterioration in resonant frequencies due to fluid immersion.

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Shape effects of micromechanical cantilever sensor

Cited by 13 publications

References 19 publications

Measurement and reliability issues in resonant mode cantilever for bio-sensing application in fluid medium

Measurement and reliability issues in resonant mode cantilever for bio-sensing application in fluid medium

Geometry optimization of uncoated silicon microcantilever-based gas density sensors

Modeling and analysis of nature‐inspired branched micropillars for enhanced dynamic bio‐sensing

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