Shape memory NiTi thin films deposited on polyimide at low temperature

Kotnur, V.G.; Tichelaar, F.D.; Fu, W.T.; Hosson, J.Th.M. De; Janssen, G. C. A. M.

doi:10.1016/j.surfcoat.2014.07.018

Cited by 29 publications

(7 citation statements)

References 15 publications

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“…1 shows the XRD pattern of the deposited TiNi thin film before and after oxidation at 400°C and 800°C. The diffraction angles for the deposited state coincide with peaks of the stainless steel substrate, as well as the TiNi martensitic structure [6,[10][11][12] with some precipitates of Ti2Ni which are formed on the grain boundaries of the deposited particles. After oxidation at 400°C, a peak corresponding to TiNi martensite plane (111) appears, suggesting that the martensitic structure begins to spread in the interior grains in addition to the grain boundaries with small precipitates of Ti2Ni [11,13].…”

Section: X-ray Diffraction Analysismentioning

confidence: 68%

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Structural, Optical and Microstructural Properties of TiNi Thin Films before and after Oxidation

Abouarab

Kassry²,

El-Mahallawi

2020

KEM

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The deposition of composites with tailored optical properties is investigated. This would employ structures consisting of combined metallic and oxides nature. A thin layer of TiNi is obtained by using RF magnetron sputtering on a stainless-steel substrate, followed by oxidation at 400°C and 800°C for four and one hours, respectively. The optical properties of the thin films were characterized by optical spectrophotometer, and Fourier Transform Infrared Spectroscopy (FTIR). The morphology, topography, and structure were studied by scanning electron microscope (SEM), atomic force microscope (AFM), and X-ray diffraction (XRD). The results show that TiO2 has been produced through the oxidation process of the sputter-deposited TiNi thin film at high oxidation temperature. The TiNi thin films showed a significant improvement in optical properties after oxidation, as the absorbance increased, and the emittance was reduced. This work introduces oxidized TiNi thin films as candidates for solar selective absorber.

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Section: X-ray Diffraction Analysismentioning

confidence: 68%

“…TiNi thin films have been extensively studied as shape memory materials [5]. In many cases their significant optical and electrical properties have been shown, but not specifically emphasized [6]. Moreover, they possess good corrosion resistance and good thermal stability, in addition to high mechanical and thermal stability [7].…”

Section: Introductionmentioning

confidence: 99%

Structural, Optical and Microstructural Properties of TiNi Thin Films before and after Oxidation

Abouarab

Kassry²,

El-Mahallawi

2020

KEM

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“…Ishida et al [ 10 ] developed the NiTiCu SMPIC actuator and proved that it can move up and down like a dragonfly toy. Kishi Y. et al [ 11 ] explored the cyclic behavior of an NiTi SMPIC actuator, and Kotnur et al [ 12 , 13 ] developed an NiTi SMA/Polyimide composite actuator through sputtering at low temperatures, and they analyzed the influence of different parameters. Several researchers [ 14 , 15 ] reported that CuAlNi is an efficient and cost-efficient alternative to the NiTi SMA/Polyimide actuator.…”

Section: Introductionmentioning

confidence: 99%

Sensor-Less Control of Mirror Manipulator Using Shape Memory Polyimide Composite Actuator: Experimental Work

Velusamy,

Kaliaperumal,

Choi

2024

Sensors

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Integrated thin film-based shape memory polyimide composites (SMPICs) are potentially attractive for efficient and compact design, thereby offering cost-effective applications. The objective of this article is to design and evaluate a mirror manipulator using an SMPIC as an actuator and a sensor with control. A sensor-less control strategy using the SMPIC (a self-sensing actuator) with a proportional derivative combined variable structure controller (PD-VSC) is proposed for position control of the mirror in both the vertical and angular directions. The mirror manipulator is able to move the mirror in the vertical and angular directions by 3.39 mm and 10.5 deg, respectively. A desired fast response is obtained as the performance under control. In addition, some benefits from the proposed control realization include good tracking, stable switching, no overshoot, no steady state oscillations, and robust disturbance rejection. These superior properties are experimentally validated to reflect practical feasibility.

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“…By incorporation of a Ru seed layer, epitaxial growth of the NiTi alloy can be achieved at some of the lowest deposition and crystallization temperatures, and thinnest films reported to date [24]. Hou also observed that the films deposited onto quartz and polyimide substrates above 623 K (equivalent to 350°C) showed a strong (110)-oriented crystalline structure [25][26][27][28]. This range of crystallization temperatures of the TiNi films suggests that the crystallization process is affected by the surface condition of the substrates.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Nanoscale Shape Memory Alloy MEMS Actuators

Knick¹

2020

Advanced Functional Materials

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The miniaturization of engineering devices has created interest in new actua tion methods capable of large displacements and high frequency responses. Shape memory alloy (SMA) thin films have exhibited one of the highest power densities of any material used in these actuation schemes and can thermally recovery strains of up to 10%. Homogenous SMA films can experience reversible shape memory effect, but without some sort of physical biasing mechanism, the effect is only one-way. SMA films mated in a multi-layer stack have the appealing feature of an intrinsic two-way shape memory effect (SME). In this work, we developed a near-equiatomic NiTi magnetron co-sputtering process and characterized shape memory effects. We mated these SMA films in several "bimorph" configurations to induce out of plane curvature in the low-temperature Martensite phase. We quantify the curvature radius vs. temperature on MEMS device structures to elucidate a relationship between residual stress, recovery stress, radius of curvature, and degree of unfolding. We fabricated and tested laser-irradiated and joule heated SMA MEMS actuators to enable rapid actuation of NiTi MEMS devices, demonstrating some of the lowest powers (5-15 mW) and operating fre quencies (1-3 kHz) ever reported for SMA or other thermal actuators.

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Shape memory NiTi thin films deposited on polyimide at low temperature

Cited by 29 publications

References 15 publications

Structural, Optical and Microstructural Properties of TiNi Thin Films before and after Oxidation

Structural, Optical and Microstructural Properties of TiNi Thin Films before and after Oxidation

Sensor-Less Control of Mirror Manipulator Using Shape Memory Polyimide Composite Actuator: Experimental Work

Fabrication and Characterization of Nanoscale Shape Memory Alloy MEMS Actuators

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