2020
DOI: 10.1109/tps.2020.2998717
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Sheath Structure in Electronegative Plasma Having Cold Ions: An Impact of Negative Ions’ Mass

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Cited by 9 publications
(7 citation statements)
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“…Finally, the electric potential distribution is obtained from Poisson's equation, as given by Equation (17).…”
Section: Modelmentioning
confidence: 99%
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“…Finally, the electric potential distribution is obtained from Poisson's equation, as given by Equation (17).…”
Section: Modelmentioning
confidence: 99%
“…The volume negative ions play an important role in processing plasmas and also in the negative ion sources. [ 12–17 ]…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…For the last several decades, plasma sheath problems have been extensively analysed using kinetic [1][2][3][4][5][6][7][8][9][10][11] and fluid [12][13][14][15][16][17][18][19][20][21][22][23][24][25][26] models. Tonks and Langmuir [1] were the first to consider the sheath in gas discharges, with cold ions and hot electrons, and solved the mystery of higher ion velocity in the sheath than the respective thermal velocity in the bulk plasma.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, Dhawan and coworkers analysed the sheath formation with different conditions in warm electronegative plasmas using a fluid description. [12][13][14][15][16][17] The fluid and numerical description of supersonic ion flow at sheath entrance were discussed in Refs. [18][19][20][21], but kinetic analysis of a sheath with supersonic ion flow is very rare.…”
Section: Introductionmentioning
confidence: 99%