Short-Term Bottleneck Detection for Process Planning in a FAB

Abstract

Abstract-This paper presents a detection process for bottlenecks in a wafer FAB (fabrication) using a simulation approach. In a semiconductor manufacturing industry, a Wafer FAB facility includes various equipment and wafer products. The wafer FAB has many characteristics, such as re-entrant processing flow and batch tools. The performance of a complex manufacturing system (i. e. semiconductor wafer FAB) is mainly decided by a bottleneck. In this paper, we define the problem of a bottleneck process and propose a simulation based framework for short-term (3 shift) bottleneck detection. By the proposed framework of this paper, the performance of a wafer FAB is improved in on-time delivery and the mean of minimum of cycle time.

Digital-twin-based decision support of dynamic maintenance task prioritization using simulation-based optimization and genetic programming

“…An example of the use of shortterm data in combination with real-time data is the identification of momentary bottlenecks [24]. Yang et al [26] proposed another method using short-term data (one day) to identify short-term bottlenecks. Gopalakrishnan et al [27] demonstrated that productivity increased by approximately 5% when the momentary bottleneck was identified as the short-term maintenance priority.…”