1993
DOI: 10.1051/jp4:1993320
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Si-C films on alloys : characterization of ageing behavior in air

Abstract: Coatings of silicon rich silicon carbide are obtained in a plasma assisted device from tetramethylsilane and argon mixture, around 760K under reduced pressure on metallic alloys: FeCrAl and NiCrA1.The atomic composition of the deposits is determined by microprobe analysis and adherence is evaluated by scratch test measurements. These results are discussed in relation with previous determinations obtained when identical films are deposited on low carbon steel substrates. All samples exhibit a similar behavior w… Show more

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“…The present study is part of a wider research work on silicon-carbide-based coatings prepared from Ar-TMS (argon-tetramethylsilane) mixtures in an inductively matched cold-wall device. In previous works some of us have shown the interest of the as-deposited films [1][2][3]. However, in such complex processes, one of the fundamental questions being addressed is that of how the deposit is constructed; or in other words, what could be a 'signature' of the deposit or what parameter could allow one to monitor the process.…”
Section: Introductionmentioning
confidence: 99%
“…The present study is part of a wider research work on silicon-carbide-based coatings prepared from Ar-TMS (argon-tetramethylsilane) mixtures in an inductively matched cold-wall device. In previous works some of us have shown the interest of the as-deposited films [1][2][3]. However, in such complex processes, one of the fundamental questions being addressed is that of how the deposit is constructed; or in other words, what could be a 'signature' of the deposit or what parameter could allow one to monitor the process.…”
Section: Introductionmentioning
confidence: 99%