2009
DOI: 10.1063/1.3242005
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Si clusters on reconstructed SiC (0001) revealed by surface extended x-ray absorption fine structure

Abstract: Characterization of hydrogen etched 6H-SiC(0001) substrates and subsequently grown AlN films

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Cited by 7 publications
(4 citation statements)
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“…The PEY method provides us with high-quality spectra and is used in many SX-XAS studies, especially in the lower-energy soft X-ray (LE-SX) region (hn = 50-1000 eV). [6] The Auger EY mode, a kind of the PEY method, is more surface sensitive by collecting only Auger electrons, using an electron energy analyzer, [7] but it often suffers from low signal-to-noise ratio and is not used so much in practical XAS measurements.…”
Section: Introductionmentioning
confidence: 99%
“…The PEY method provides us with high-quality spectra and is used in many SX-XAS studies, especially in the lower-energy soft X-ray (LE-SX) region (hn = 50-1000 eV). [6] The Auger EY mode, a kind of the PEY method, is more surface sensitive by collecting only Auger electrons, using an electron energy analyzer, [7] but it often suffers from low signal-to-noise ratio and is not used so much in practical XAS measurements.…”
Section: Introductionmentioning
confidence: 99%
“…Upon high temperature annealing of SiC in vacuum, Si nanoclusters (Si n ) from the near surface region of SiC crystals keep on diffusing outwards to the surfaces [31], where dissociation of oxygen-containing molecules into oxygen-containing species also takes place. According to the phase diagrams of oxidized Si and SiC surfaces, active oxidation producing partially oxidized silicon, e.g., SiO, occurs at high temperature and low oxygen pressures [32,33].…”
Section: Resultsmentioning
confidence: 99%
“…1). We show that the transition from monolayer EG to trilayer EG adopts a bottom-up growth mechanism [4], and x-ray absorption fine structure studies indicate an increase in disorder of Si atoms in the SiC substrate beneath the surface and the formation of Si clusters [5,6].…”
mentioning
confidence: 88%