2017
DOI: 10.1016/j.jmmm.2016.12.084
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Si/Fe flux ratio influence on growth and physical properties of polycrystalline β-FeSi2 thin films on Si(100) surface

Abstract: This work investigates the Si/Fe flux ratio (2 and 0.34) influence on growth of β-FeSi 2 polycrystalline thin films on Si(100) substrate at 630 ˚C. Lattice deformation for the films obtained are confirmed by X-ray diffraction analysis (XRD). The volume unit cell deviation from that of β-FeSi 2 single crystal are 1.99 % and 1.1 % for Si/Fe = 2 and Si/Fe = 0.34, respectively. Absorption measurements show that the indirect transition (~ 0.813 eV) of the Si/Fe = 2 sample changes to the direct transition with a ban… Show more

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Cited by 19 publications
(7 citation statements)
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“…Indeed, there is a set of reports on the growth of such interfaces on Si(001) substrate by molecular beam exitaxy methods (Tarasov et al, 2016;Pushkarev et al, 2018). At the same time, numerous experimental works show this compound tends more to form free-standing nanocrystals partially embedded into silicon matrix (Tripathi et al, 2013;Tarasov et al, 2016;Chen et al, 2006;Tarasov et al, 2017;Pushkarev et al, 2018), often with endotaxial (112)||Si(111) interface formation, in compliance with the relative favourability order of the habit planes found herein. The presence of several high-index silicon planes among the topmost ORs (||Si i.2, ||Si i.3, ||Si i.14, ||Si i.20) also suggests endotaxial growth of -FeSi 2 crystallites on Si(001).…”
Section: Atomic Configurationsupporting
confidence: 76%
“…Indeed, there is a set of reports on the growth of such interfaces on Si(001) substrate by molecular beam exitaxy methods (Tarasov et al, 2016;Pushkarev et al, 2018). At the same time, numerous experimental works show this compound tends more to form free-standing nanocrystals partially embedded into silicon matrix (Tripathi et al, 2013;Tarasov et al, 2016;Chen et al, 2006;Tarasov et al, 2017;Pushkarev et al, 2018), often with endotaxial (112)||Si(111) interface formation, in compliance with the relative favourability order of the habit planes found herein. The presence of several high-index silicon planes among the topmost ORs (||Si i.2, ||Si i.3, ||Si i.14, ||Si i.20) also suggests endotaxial growth of -FeSi 2 crystallites on Si(001).…”
Section: Atomic Configurationsupporting
confidence: 76%
“…The presented computer model for investigation of growth processes in iron silicide thin films during sputtering was created to carefully account for the events occurring in experimental setups for epitaxial film growth [46][47][48]. Modeling of iron and silicon atoms co-deposition on the (111) and (100) silicon substrates was carried out using molecular dynamics methods in GPU-accelerated [49] LAMMPS program package [50].…”
Section: Computational Methodologymentioning
confidence: 99%
“…The other two peaks belong to the Si substrate. 20,21 The position of diffraction peak for FeSi 2 is comparable to the diffraction peaks for FeSi 2 thin film on Si substrate at 45.81 . 20 It must be noted that the comparison is only done with the diffraction peaks for FeSi 2 thin films rather than the bulk values, because the lattice parameters in thin films could be different from the bulk ones.…”
Section: Sample Preparationmentioning
confidence: 59%
“…20,21 The position of diffraction peak for FeSi 2 is comparable to the diffraction peaks for FeSi 2 thin film on Si substrate at 45.81 . 20 It must be noted that the comparison is only done with the diffraction peaks for FeSi 2 thin films rather than the bulk values, because the lattice parameters in thin films could be different from the bulk ones. Also, considering the annealing conditions and the stoichiometry of our [Fe(3.6 nm)/Si (4.5 nm)] Â 13 sample, we can rule out the presence of Fe and other iron silicides and can infer that the diffraction peak at 45.66 is due to FeSi 2 compound only.…”
Section: Sample Preparationmentioning
confidence: 59%