2008
DOI: 10.1364/oe.16.016877
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Si lattice parameter measurement by centimeter X-ray interferometry

Abstract: A combined X-ray and optical interferometer capable of centimeter displacements has been made to measure the lattice parameter of Si crystals to within a 3 x 10(-9) relative uncertainty. This paper relates the results of test measurements carried out to assess the capabilities of the apparatus.

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Cited by 49 publications
(62 citation statements)
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“…4 has been corrected for the errors listed in Table 1, but the bars indicate only the standard deviation of the averages. A detailed discussion of the correction and uncertainty contributions is presented by Ferroglio et al (2008); a short summary is now given.…”
Section: Measurement Resultsmentioning
confidence: 99%
“…4 has been corrected for the errors listed in Table 1, but the bars indicate only the standard deviation of the averages. A detailed discussion of the correction and uncertainty contributions is presented by Ferroglio et al (2008); a short summary is now given.…”
Section: Measurement Resultsmentioning
confidence: 99%
“…Natural silicon consists of three stable isotopes, 28 Si, 29 Si, and 30 Si, whose approximate isotopic abundances are 92 %, 5 %, and 3 %, respectively. In equations (6) and 7, the mean molar mass obtained from the measurements of the composition of each isotope in the crystal should be used.…”
Section: -1 28 Si-enriched Crystalmentioning
confidence: 99%
“…Figure 7 shows how the measurement uncertainty reduced in time. Since the Deslattes' measurement in 1973, the quality of the interferometers improved (from natural Si [27] to hyper-pure Si [35] and enriched 28 Si [40]), the interferometer size and displacement increased (from a few micrometres [27] to 5 cm [33,41]), the degrees of freedom electronically controlled extended (from one [27] to six [42]), differential wavefront sensing supplemented both X-ray and optical interferometry [43], and systematic effects were sought and investigated [23].…”
Section: Resultsmentioning
confidence: 99%