Si-monolithic integrated pyroelectric infrared sensor made of PbTiO3 thin films

Okuyama, Masanori; Ohtani, Kohzo; Ueda, Tetsufumi; Hamakawa, Yoshihiro

doi:10.1007/bf01014414

Cited by 16 publications

(3 citation statements)

References 23 publications

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“…The responsivity of the Si monolithic sensor can be raised by removing the Si substrate beneath the sensitive area, as shown in Figure 5.9 [20]. A linear array sensor having 16 elements was fabricated and infrared imaging was also carried out [21,22]. Axis-oriented PbTiO 3 and PLT deposited on Pt/MgO have been used.…”

Section: Infrared Sensormentioning

confidence: 99%

Sensors and Actuators Using Ferroelectric Thin Films

Okuyama

1999

Sensors Update

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Section: Infrared Sensormentioning

confidence: 99%

Sensors and Actuators Using Ferroelectric Thin Films

Okuyama

1999

Sensors Update

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“…Low dimensional ferroelectric perovskites have attracted an increased interest in the past decade due to their wide range of potential applications in integrated piezoelectric devices, 1,2 microsensors, 3,4 infrared detectors, 5 optical wave p-guiding devices, 6 electro-optic modulators, 7,8 actuators, ultrahigh density storage media, 9 and microelectromechanical devices. 4,10 As the temperature stability of the electrical properties and the critical size at which ferroelectricity is suppressed are key requirements for device applications, PbTiO 3 , with its chemical stability, high Curie temperature (T c = 490 °C), large spontaneous polarization, small coercivity, and low permittivity is one of the most technologically relevant members of the Ti-containing perovskite family.…”

Section: Introductionmentioning

confidence: 99%

Characterization of the Microstructural and Piezoelectric Properties of PbTiO₃ Thin Films Synthesized by Liquid-Phase Deposition

Yourdkhani

Caruntu

2011

J. Phys. Chem. C

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The microstructure and the ferroelectric properties of mirrorlike polycrystalline PbTiO3 thin films were studied as a function of the film thickness. Highly uniform PbTiO3 films were deposited onto LaNiO3-buffered (100) Si substrates by liquid phase deposition at temperatures as low as 45 °C. The as-deposited films are amorphous and can be easily converted into single phase PbTiO3 thin films upon a heat treatment at 750 °C in air for 6 h. X-ray diffraction patterns of the films have shown that they are chemically pure and adopt a tetragonal structure with the value of the lattice volume slightly smaller than that of the bulk material, indicating the presence of a compressive stress. This was furthermore confirmed by Raman spectroscopy by monitoring the variation of the positions of the soft optical phonon modes with the thickness of the films compared to that of those measured from a powdered sample. The E(1TO) and E(2TO) phonon modes undergo an upward shift and this shift decreases with increasing as the films get thicker indicating the presence of a compressive stress which decreases with increasing the film thickness. Piezoelectric force microscopy (PFM) and PFM bit-lithography experiments performed at room temperature allowed not only the visualization of the ferroelectric domain structure but also control the orientation of dipoles with an external electric field, thereby confirming the high quality of the films. The PbTiO3 films are formed by 180° ferroelectric domains and the static value of the piezoelectric coefficient d33 was found to increase with the film thickness, presumably as a result of the reduction of the stress and the substrate-induced clamping effect.

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“…Pyroelectric infrared sensors are mature technology to obtain the thermal image contactlessly [8][9][10][11][12][13]. A PZT thin film is also actively researched for a pyroelectric material, and is established to deposit with high compatibility for the micromachining [14][15][16]. Figure 1 shows a schematic illustration of the non-contact thermal diagnostic system we propose.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems

Suita

Hara

Ishikawa

et al. 2013

JAMDSM

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This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O 3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.

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Si-monolithic integrated pyroelectric infrared sensor made of PbTiO3 thin films

Cited by 16 publications

References 23 publications

Sensors and Actuators Using Ferroelectric Thin Films

Sensors and Actuators Using Ferroelectric Thin Films

Characterization of the Microstructural and Piezoelectric Properties of PbTiO₃ Thin Films Synthesized by Liquid-Phase Deposition

Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems

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Si-monolithic integrated pyroelectric infrared sensor made of PbTiO3 thin films

Cited by 16 publications

References 23 publications

Sensors and Actuators Using Ferroelectric Thin Films

Sensors and Actuators Using Ferroelectric Thin Films

Characterization of the Microstructural and Piezoelectric Properties of PbTiO3 Thin Films Synthesized by Liquid-Phase Deposition

Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems

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Characterization of the Microstructural and Piezoelectric Properties of PbTiO₃ Thin Films Synthesized by Liquid-Phase Deposition