1997
DOI: 10.1016/s0169-4332(97)80159-6
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Si nanofabrication using AFM field enhanced oxidation and anisotropic wet chemical etching

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Cited by 35 publications
(15 citation statements)
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“…Several experimental groups have studied capillary-induced water bridges on the nanometer scale. New applications in imaging and nanofabrication have driven efforts to understand nanometer-size capillarity. , Capillary transport of molecules from the AFM tip to the solid substrate has been used by Piner et al to write patterns of molecules of submicrometer dimensions. This technique, called dip pen nanolithography, has been also used by Lee et al to generate protein nanoarrays over different surfaces.…”
Section: Capillarity Phenomena:  Water Bridges and Necksmentioning
confidence: 99%
“…Several experimental groups have studied capillary-induced water bridges on the nanometer scale. New applications in imaging and nanofabrication have driven efforts to understand nanometer-size capillarity. , Capillary transport of molecules from the AFM tip to the solid substrate has been used by Piner et al to write patterns of molecules of submicrometer dimensions. This technique, called dip pen nanolithography, has been also used by Lee et al to generate protein nanoarrays over different surfaces.…”
Section: Capillarity Phenomena:  Water Bridges and Necksmentioning
confidence: 99%
“…Liquid bridges have also played a key role in the STM imaging of poor conducting biomolecules such as DNA molecules deposited on insulating substrates [6]. Recent advances in scanning probe microscopy applications for both imaging and nanofabrication have driven new efforts to understand nanometer-size systems involving capillaries [7][8][9][10].…”
mentioning
confidence: 99%
“…During the writing processes, performed in contact mode at a defined set-point force below 10 nN, the tip scans the surface at constant speed (1 4 m/s) according to a pre-designed pattern. A positive tip-sample bias induces the GaAs local surface oxidation confined in a small water meniscus due to environmental humidity below the tip [77][78][79][80], as shown in Fig. 8.4a.…”
Section: Hot Electrons Imagingmentioning
confidence: 99%