Abstract:In this work, a textured surface structure of Si substrate has been prepared using pyramid structure ZnO glass as mask, and the structure of textured surface and reflection characteristics of Si substrate have been analyzed by scanning electron microscope (SEM) and reflectivity spectra. The results show that U-shaped structure is formed on the surface of photoresist after the incidence of ultraviolet light, and it is caused by the different decrement of light intensity in the ZnO glass Mask Blank. The U-shaped… Show more
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