2001
DOI: 10.1109/41.915409
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SiC devices for advanced power and high-temperature applications

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Cited by 92 publications
(25 citation statements)
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“…Samples I60, I150, and I720 were irradiated substrates oxidized in the same temperature and pressure conditions as samples N360 for 60, 150, and 720 min, respectively ͑see Table I͒. RBS in channeling geometry (c-RBS͒ analyses ͑detection angle was 170°) were performed in a 3 MV HV Tandetron ion accelerator with 2 MeV He ϩ ions aligned in the ͗0001͘ crystal axis in order to determine the oxide thickness in different samples and to infer about the residual damage in the SiC substrate. The areal density of O in the films was determined from the areas of the corresponding O signals in the RBS spectra, calibrated against a SiO 2 Table I. After this procedure, the oxide surface morphology of the different samples was probed using AFM, performed on a Digital Instruments Nanoscope IIIa in tapping mode.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Samples I60, I150, and I720 were irradiated substrates oxidized in the same temperature and pressure conditions as samples N360 for 60, 150, and 720 min, respectively ͑see Table I͒. RBS in channeling geometry (c-RBS͒ analyses ͑detection angle was 170°) were performed in a 3 MV HV Tandetron ion accelerator with 2 MeV He ϩ ions aligned in the ͗0001͘ crystal axis in order to determine the oxide thickness in different samples and to infer about the residual damage in the SiC substrate. The areal density of O in the films was determined from the areas of the corresponding O signals in the RBS spectra, calibrated against a SiO 2 Table I. After this procedure, the oxide surface morphology of the different samples was probed using AFM, performed on a Digital Instruments Nanoscope IIIa in tapping mode.…”
Section: Methodsmentioning
confidence: 99%
“…1,2 This is due to certain properties of this material including wide band gap, high breakdown electric field, high thermal conductivity and high-saturated electron drift velocity. 3,4 However, the feature that really sets SiC apart from other wide band-gap semiconductors is the possibility of growing a well-known dielectric film on this material by thermal oxidation, namely, SiO 2 .…”
Section: Introductionmentioning
confidence: 99%
“…1,2 However, ion implantation during device fabrication, as well as heavy-ion irradiation in space application will inevitably induce displacement defects. Such defects can undergo migration, recombination and aggregation in the long term, leading to degradation in electronic, [3][4][5] and thermal 6,7 properties as well as dimensional instability.…”
Section: Introductionmentioning
confidence: 99%
“…This is because the upper limit of operating temperature for Si power devices has been increased from 125 °C towards 200 °C, and those for wide-band gap power devices (i.e. SiC and GaN power devices) are even higher [1]- [5]. Due to the epoxy matrix, conductive adhesives degrade at temperatures above 177 °C, and are mainly used for die attachments where conditions are below 70 °C.…”
Section: Introductionmentioning
confidence: 99%