SiCNFe Ceramics as Soft Magnetic Material for MEMS Magnetic Devices: A Mössbauer Study

Stiharu, Ion; Andronenko, S. I.; Zinnatullin, Almaz L.; Vagizov, F. G.

doi:10.3390/mi14050925

Cited by 6 publications

(3 citation statements)

References 42 publications

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“…The Si-C-N has shown stability up to 1600C and it remains in the amorphous state up to 1500 o C. These properties make silicon carbonitride a promising material for prospective applications such as structural ceramics, MEMS, hard protective coatings, and electronic materials [3]. SiCN is being currently looked for the absorption of electromagnetic waves (shielding) [4-7], as thin film pressure and temperature sensors [8-11], as a bonding layer for memory devices [12] MEMS magnetic devices [13] and even in endodontics [14]. Theoretical studies have shown SiC2N2 tetrahedra to be the most stable structure of SiCN.…”

Section: Introductionmentioning

confidence: 99%

Raman Analysis of Deposition Pressure Variations in Nanocomposite SiCN Coatings: A 4-Stage Model

Bhattacharyya

2024

Preprint

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Polymer-derived ceramic (PDC) based coatings like Si-C-N and their derivatives are gaining importance day by day in N/MEMS and aerospace due to their thermos-mechanical stability and conductivity. The crystallized, amorphous, and near amorphous morphology of SiCN nanocomposite coatings based on deposition conditions requires thorough investigation for appropriate utilization as they lead to differences in mechanical properties (quantified using nanoindentation in this case). A 4-stage model was proposed based on Raman spectroscopy due to the N2-Ar pressure variations during the deposition process of SiCN coatings by magnetron sputtering. The integral intensity of the G (graphitic), disorder (D), and tetrahedral (T) peaks namely IG, ID, and IT were calculated after the deconvolution of the spectra. The sp2 domain size and defect parameters were evaluated and correlated with the hardness and different bond formation involving Si, C, and N. Image analysis revealed the atomic migration involved during the growth process leading to crystallization along with the formation of voids and defects. The observations were supported by FTIR and TEM-SAED analysis. The outcomes provide a foundation causing an urge to develop similar models with further elemental additions and correlate with various physical properties.

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Section: Introductionmentioning

confidence: 99%

Raman Analysis of Deposition Pressure Variations in Nanocomposite SiCN Coatings: A 4-Stage Model

Bhattacharyya

2024

Preprint

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“…Therefore, a large number of optimized designs have been proposed from three perspectives. First, newer core materials mean higher saturation flux density and permeability, resulting in smaller core size and loss [ 13 , 14 ]. Secondly, magnetic integration techniques are also favored by researchers [ 15 , 16 , 17 , 18 ].…”

Section: Introductionmentioning

confidence: 99%

Loss-Optimized Design of Magnetic Devices

Zhao,

Ming,

2024

Micromachines

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Maximizing efficiency, power density, and reliability stands as paramount objectives in the advancement of power electronic systems. Notably, the dimensions and losses of magnetic components emerge as primary constraints hindering the miniaturization of such systems. Researchers have increasingly focused on the design of loss minimization and size optimization of magnetic devices. In this paper, with the objective of minimizing the loss of magnetic devices, an optimal design method for the winding structure of devices is proposed based on the coupling relationship between the loss prediction model and the design variables. The method examines the decoupling conditions between the design variables and the loss model, deriving optimized design closure equations for the design variables. This approach furnishes a technical foundation for the miniaturized design of miniature apparatuses incorporating magnetic components, offering a straightforward and adaptable design methodology. The finite element method simulation results and experimental measurement data verify the accuracy of the prediction of the proposed method and the validity of the optimal design theory of device loss.

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“…They also offer several desirable characteristics, including thermal and chemical stability [2], excellent adherence to multiple surfaces [3][4][5], and the tunability of material properties. These characteristics allow for their use in a wide range of applications in micro-electro-mechanical systems (MEMS), biomedical implants, harsh environment sensors, and fuel cells [6][7][8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Development of Inkjet Printable Formulations Based on Polyorganosilazane and Divinylbenzene

Qazzazie-Hauser,

Honnef,

Hanemann

2023

Polymers

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Within this work, ink formulations based on polyorganosilazane (OPSZ) and divinylbenzene (DVB) were developed to be processed by inkjet printing. The formulations were studied regarding their rheological, structural, and thermal properties. The rheological results show that the new formulations meet the requirements of the inkjet printer by showing both low viscosity (below 20 mPa∙s at printing temperature) and Newtonian flow behavior even at high shear rates. Additionally, the inks have surface tensions in the range of 21 to 26 mN/m2. First, printing experiments of single layers were successfully conducted and show that the developed formulations can be processed by inkjet printing. The inks were crosslinked by UV light and then pyrolyzed at 1100 °C resulting in a ceramic yield between 75 and 42%, depending on the ink formulation. The crosslinking behavior was studied via FTIR spectroscopy, and the results reveal that crosslinking occurs mainly via free-radical polymerization of the vinyl group. Furthermore, the results indicate that silicon carbonitride (SiCN) was formed after the pyrolysis. The results of the electrical properties of the amorphous ceramics differ in dependence on the amount of DVB in the formulation. A maximum electrical conductivity of 1.2 S/cm−1 was observed for a UV-cured sample with a high amount of DVB pyrolyzed at 1100 °C. The generation in electrical conductivity is given by the formation of free carbon derived most likely by DVB.

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SiCNFe Ceramics as Soft Magnetic Material for MEMS Magnetic Devices: A Mössbauer Study

Cited by 6 publications

References 42 publications

Raman Analysis of Deposition Pressure Variations in Nanocomposite SiCN Coatings: A 4-Stage Model

Raman Analysis of Deposition Pressure Variations in Nanocomposite SiCN Coatings: A 4-Stage Model

Loss-Optimized Design of Magnetic Devices

Development of Inkjet Printable Formulations Based on Polyorganosilazane and Divinylbenzene

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