2018
DOI: 10.1063/1.5022628
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Side extraction: A novel method of filtering ions or macro-particles for vacuum arc ion sources

Abstract: A novel ion-extraction method named side extraction, i.e., extracting ions from the direction perpendicular to that of plasma expansion, is proposed in this paper, which can be used to filter ions or macro-particles for vacuum arc ion sources. Particle-in-cell simulations were performed to study filtering effects of side extraction on ions with different mass, different charges, and different initial kinetic energies. The results indicate that side extraction can separate ions by their charge states or initial… Show more

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