Signal Conditioning System With a 4–20 mA Output for a Resonant Magnetic Field Sensor Based on MEMS Technology

Domínguez-Nicolás, Saúl M.; Juarez-Aguirre, R.; García-Ramírez, Pedro J.; Herrera-May, Agustín L.

doi:10.1109/jsen.2011.2167012

Cited by 15 publications

(8 citation statements)

References 14 publications

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“…Domínguez-Nicolás et al [33] presented a resonant magnetic microsensor made using MEMS technology, and the sensor had a sensitivity of 4 V/T. In comparison to Beroulle et al [30], Herrera-May et al [31] and Domínguez-Nicolás et al [33], the sensitivity of this work exceeds that of Beroulle et al [30] and Herrera-May et al [31]. The power consumption of the magnetic sensor proposed by Choi et al [7] was 140 μW, and the magnetic sensor presented by Li et al [8] had a power consumption of 0.58 mW.…”

Section: Resultsmentioning

confidence: 99%

Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors

Hsieh

Dai

Yang

2013

Sensors

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This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force. The finite element method (FEM) software CoventorWare is adopted to simulate the displacement and capacitance of the magnetic sensor. A post-CMOS process is utilized to release the suspended structure. The post-process uses an anisotropic dry etching to etch the silicon dioxide layer and an isotropic dry etching to remove the silicon substrate. When a magnetic field is applied to the magnetic sensor, it generates a change in capacitance. A sensing circuit is employed to convert the capacitance variation of the sensor into the output voltage. The experimental results show that the output voltage of the magnetic microsensor varies from 0.05 to 1.94 V in the magnetic field range of 5–200 mT.

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Section: Resultsmentioning

confidence: 99%

Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors

Hsieh

Dai

Yang

2013

Sensors

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“…Considering the third bullet above and thus the electronics, while few examples of driving circuits for magnetometers implemented with discrete components exist [36], none of them considers power consumption issues. When considering this relevant constraint, a low-power Pierce oscillator topology appears the most suitable one, as it minimizes the number of required stages.…”

Section: Perspective For Driving Circuit Integrationmentioning

confidence: 99%

A Sub-400-nT/<inline-formula> <tex-math notation="LaTeX">$\sqrt {\text {Hz}}$ </tex-math></inline-formula>, 775-<inline-formula> <tex-math notation="LaTeX">$\mu \text{W}$ </tex-math></inline-formula>, Multi-Loop MEMS Magnetometer With Integrated Readout Electronics

Minotti

Brenna

Laghi

et al. 2015

J. Microelectromech. Syst.

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This paper presents a novel z-axis Lorentz force magnetometer coupled with a low-power readout integrated circuit. The sensor is fabricated using an industrial process, and exploits an Al-on-polysilicon multi-loop architecture that gives a five-fold sensitivity and resolution improvement, useful for off-resonance operation. The integrated readout is based on a differential charge amplifier front-end, and designed to be balanced with the sensor in terms of noise and power consumption. The overall system, including demodulation and filtering stages, shows a programmable full-scale up to ±2.4 mT, limited by the electronics saturation. The bandwidth can be programmed up to 150 Hz for off-resonance operation where a sub-400-nT/ √ Hz resolution at 775-µW power consumption is obtained, including the integrated readout and the Lorentz current. Perspectives on low-consumption driving oscillators for off-resonance mode are finally given.[ 2015-0139]Index Terms-Microelectromechanical systems (MEMS) sensors, magnetometers, capacitive sensing interface, navigation. 1057-7157

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“…These devices provide the following advantages: small size, low power consumption, high sensitivity and reduced fabrication cost [ 2 ]. Recently, several researchers [ 3 , 4 , 5 , 6 , 7 , 8 ] have designed MEMS magnetic field sensors for potential applications such as biomedical, telecommunications, navigation and non-destructive testing. Most of these sensors include resonators that operate with the Lorentz force, which is generated by the interaction between an external magnetic field and an electrical current.…”

Section: Introductionmentioning

confidence: 99%

“…MEMS magnetic field sensors use a bias source and a signal processing system. For instance, Dominguez-Nicolás et al [ 4 ] designed a signal conditioning system, implemented in a printed circuit board (PCB), for a MEMS magnetic field sensor. It obtains the sensor response in voltage or current mode for a magnetic field range from −150 μT to +150 μT.…”

Section: Introductionmentioning

confidence: 99%

Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges

Herrera-May

Soler-Balcazar

Vázquez-Leal

et al. 2016

Sensors

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Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sensors with potential applications such as biomedicine, automotive industry, navigation systems, space satellites, telecommunications and non-destructive testing. We present a review of recent magnetic field sensors based on MEMS resonators, which operate with Lorentz force. These sensors have a compact structure, wide measurement range, low energy consumption, high sensitivity and suitable performance. The design methodology, simulation tools, damping sources, sensing techniques and future applications of magnetic field sensors are discussed. The design process is fundamental in achieving correct selection of the operation principle, sensing technique, materials, fabrication process and readout systems of the sensors. In addition, the description of the main sensing systems and challenges of the MEMS sensors are discussed. To develop the best devices, researches of their mechanical reliability, vacuum packaging, design optimization and temperature compensation circuits are needed. Future applications will require multifunctional sensors for monitoring several physical parameters (e.g., magnetic field, acceleration, angular ratio, humidity, temperature and gases).

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Signal Conditioning System With a 4–20 mA Output for a Resonant Magnetic Field Sensor Based on MEMS Technology

Cited by 15 publications

References 14 publications

Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors

Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors

A Sub-400-nT/<inline-formula> <tex-math notation="LaTeX">$\sqrt {\text {Hz}}$ </tex-math></inline-formula>, 775-<inline-formula> <tex-math notation="LaTeX">$\mu \text{W}$ </tex-math></inline-formula>, Multi-Loop MEMS Magnetometer With Integrated Readout Electronics

Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges

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