“…[27] Common techniques for characterizing ammonia plasma include chemical ionization mass spectrometry (CIMS), [28] infrared absorption spectroscopy (FTIR), [24] Langmuir probes, [20] optical emission spectroscopy (OES), [9,12,13,16,18,[20][21][22] laser interferometry, [9] and mass spectroscopy by RGA. [9,21] Many of the experimentalists used RF inductively (ICP) [9,11,12,[15][16][17][18][19][20][21]23,27,29] and capacitively (CCP) [8,22,24,30] coupled systems for generating the discharge. Details about the experimental setup are rarely described in the cited literature; often only external parameters, such as the gas pressure and discharge power, at which the experiment was performed, are given.…”