Silicide phases formation in Co/c-Si and Co/a-Si systems during thermal annealing

Swift heavy ion beam mixing at V/Si interface

“…Their relatively low electric resistivity and good compatibility with silicon substrates make them eminently suitable candidate materials for contacts or interconnects in electronic applications [7][8][9][10][11][12]. Among metal silicides the vanadium silicide system with different phases [13] has been found to be of increasing interest because one of the silicide phases namely V 3 Si (A-15 structure) exhibits high temperature superconductivity [14] while another phase, VSi 2 , shows an interesting combination of refractory properties and good electrical conductivity [15].…”