Silicon angular rate sensor for automotive applications with piezoelectric drive and piezoresistive read-out

Voss, R.; Bauer, Karin; Ficker, W.; Gleissner, T.; Kupke, W.; Rose, M. J.; Sassen, S.; Schalk, J.; Seidel, Helmut; Stenzel, E.

doi:10.1109/sensor.1997.635242

Cited by 48 publications

(22 citation statements)

References 5 publications

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“…By optically tracking the position of the wing, we measured the dynamics of wing deformation during a combination of flapping and body rotation. Our model wing consisted of a 50 Â 25 mm acrylic sheet with a flexural stiffness of 10 25 Nm 2 that well approximated a Manduca forewing [20]. To track bending during each trial, we drew a 5 Â 9 grid of fiduciary markers on our wing model with correction fluid (figure 3b).…”

Section: Robotically Actuated Model With Position Trackingmentioning

confidence: 99%

A new twist on gyroscopic sensing: body rotations lead to torsion in flapping, flexing insect wings

Eberle

Dickerson

Reinhall

et al. 2015

J. R. Soc. Interface.

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Insects perform fast rotational manoeuvres during flight. While two insect orders use flapping halteres (specialized organs evolved from wings) to detect body dynamics, it is unknown how other insects detect rotational motions. Like halteres, insect wings experience gyroscopic forces when they are flapped and rotated and recent evidence suggests that wings might indeed mediate reflexes to body rotations. But, can gyroscopic forces be detected using only changes in the structural dynamics of a flapping, flexing insect wing? We built computational and robotic models to rotate a flapping wing about an axis orthogonal to flapping. We recorded high-speed video of the model wing, which had a flexural stiffness similar to the wing of the Manduca sexta hawkmoth, while flapping it at the wingbeat frequency of Manduca (25 Hz). We compared the three-dimensional structural dynamics of the wing with and without a 3 Hz, 108 rotation about the yaw axis. Our computational model revealed that body rotation induces a new dynamic mode: torsion. We verified our result by measuring wing tip displacement, shear strain and normal strain of the robotic wing. The strains we observed could stimulate an insect's mechanoreceptors and trigger reflexive responses to body rotations.

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Section: Robotically Actuated Model With Position Trackingmentioning

confidence: 99%

A new twist on gyroscopic sensing: body rotations lead to torsion in flapping, flexing insect wings

Eberle

Dickerson

Reinhall

et al. 2015

J. R. Soc. Interface.

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show abstract

“…A silicon micromachined gyroscope with a conventional vibrating fork structure (i.e. a structure comprising a fork with vibrating tines) is the angular-rate sensor produced by Daimler-Benz (Voss et al, 1997). …”

Section: Mems Gyroscopes For Consumer and Industrial Applicationsmentioning

confidence: 99%

“…quartz, ceramics, special alloys or piezoelectric polymers) to change their shape when subjected to an electric field is effectively exploited to generate a mechanical deformation or displacement. With regards to sensing, either the direct piezoelectric effect (Kotru et al, 2008;Soderkvist, 1991) (generation of an electric field in response to a mechanical strain) or the piezoresistive effect (Li et al, 1999;Voss et al, 1997) (change of electrical resistance in response to a mechanical stress) are effectively used to sense the Coriolis-induced motion.…”

Section: Actuation and Sensing Mechanismsmentioning

confidence: 99%

MEMS Gyroscopes for Consumers and Industrial Applications

Oboe¹,

Oboe²

2011

Microsensors

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“…In addition, it exhibits good piezoelectric properties and high chemical and thermal stability (Yim et al 1973). Publications in fields such as surface acoustic wave resonators (Caliendo 2003), bulk acoustic wave resonators (Lanz and Muralt 2005), contour mode resonators (Piazza and Pisano 2007) and gyroscopes (Voss et al 1997) demonstrate the possibilities of AlN for MEMS actuation.…”

Section: Introductionmentioning

confidence: 99%

Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators

et al. 2010

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Micro-cantilevers and micro-bridges actuated by sputter-deposited aluminium nitride (AlN) thin films were measured with a scanning laser Doppler vibrometer up to 6 MHz, covering more than 10 resonance modes of different nature. A finite element model (FEM) was used to simulate the modal response of the micromachined structures. The comparison between experiment and simulation, regarding modal shapes and frequencies, resulted in an excellent agreement. An interferometric microscope was also used to study the static deflection of the structures. These measurements revealed a very low surface stress for the different micro-resonators. Finally, we point out how the amplitude of a given resonant mode can be controlled depending on the piezoelectric charge collected by the top electrode layout.

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Silicon angular rate sensor for automotive applications with piezoelectric drive and piezoresistive read-out

Cited by 48 publications

References 5 publications

A new twist on gyroscopic sensing: body rotations lead to torsion in flapping, flexing insect wings

A new twist on gyroscopic sensing: body rotations lead to torsion in flapping, flexing insect wings

MEMS Gyroscopes for Consumers and Industrial Applications

Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators

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