Silicon based Metamaterials for Dielectric Waveguides in the THz Range

Schenkel, Francesca; Barengolts, Irwin; Schmitt, Lisa; Rolfes, Ilona; Hoffmann, Martin; Barowski, Jan

doi:10.1109/mms55062.2022.9825523

Cited by 3 publications

(1 citation statement)

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“…Instead, we aim at creating an effectively homogenous material with a significantly lowered average refractive index than the original silicon. Structures 1)-3) were analyzed in terms of volume fraction ratio air/Si and effective refractive index [23]. Table I summarizes the considered design parameters of these three metamaterials.…”

Section: Supporting Metamaterials Structurementioning

confidence: 99%

Design, Simulation, and Characterization of MEMS-Based Slot Waveguides

Barowski

Schmitt

Kother

et al. 2023

IEEE Trans. Microwave Theory Techn.

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This contribution presents a design approach as well as characterization results for dielectric slot waveguides fabricated in highly resistive (HR) silicon (HR-Si) designed for operation in the terahertz (THz) frequency range. The authors discuss the fundamentals of dielectric slot waveguides and the respective figures of merit. Furthermore, analytical solutions as well as numerical results from field simulations of the propagating mode are presented and discussed. Prototypes are fabricated in a process for HR-Si microelectromechanical systems (MEMSs), including a silicon-based metamaterial to mechanically support the waveguide while preserving a strong field confinement. In addition, actuator concepts to implement device functionalities, such as phase shifting capabilities, are demonstrated. The prototypes are measured and characterized using vector network analyzer (VNA)-based two-port measurements in the frequency range from 220 to 330 GHz. The devices are characterized in terms of their field confinement, loss, and effective mode index. For the first time, the authors report on the experimental validation of dielectric slot waveguides in this frequency range and provide values for the obtained losses.

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Section: Supporting Metamaterials Structurementioning

confidence: 99%