2020
DOI: 10.1002/adom.202000449
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Silicon‐Based Terahertz Meta‐Devices for Electrical Modulation of Fano Resonance and Transmission Amplitude

Abstract: EM waves and have demonstrated novel phenomena like negative refraction, super lenses, invisibility cloaks, slow light effects, and subwavelength resolution imaging. [4-14] To date, silicon has emerged as a popular material choice to design THz metamaterials devices in terms of modulators, absorbers, and polarization converters, [15-18] due to not only its high refractive index and very low absorption losses in the THz frequencies, but also its mature processing technology. The shape and linewidth of an EM res… Show more

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Cited by 60 publications
(40 citation statements)
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“…Metamaterials 24‐43 and its two‐dimensional (2D) counterpart metasurfaces 44‐68 made from plasmonic resonant 69‐73 or Mie resonant building blocks 74‐84 are especially promising for the enhancement of light–matter interactions 19,85,86 at a subwavelength scale. Various plasmonic and Mie metamaterials have been proposed for achieving high Q factor response, 87‐96 for example, the trapped mode, which is kind of magnetic mode weakly coupled to free space, was suggested to be excited by introducing symmetry breaking in the shape of structural elements for realizing sharp spectral response 87 .…”
Section: Introductionmentioning
confidence: 99%
“…Metamaterials 24‐43 and its two‐dimensional (2D) counterpart metasurfaces 44‐68 made from plasmonic resonant 69‐73 or Mie resonant building blocks 74‐84 are especially promising for the enhancement of light–matter interactions 19,85,86 at a subwavelength scale. Various plasmonic and Mie metamaterials have been proposed for achieving high Q factor response, 87‐96 for example, the trapped mode, which is kind of magnetic mode weakly coupled to free space, was suggested to be excited by introducing symmetry breaking in the shape of structural elements for realizing sharp spectral response 87 .…”
Section: Introductionmentioning
confidence: 99%
“…[ 43 ] In addition, a layer of silicon‐free carriers does not have a significant response to the incident optical waves at low values of the bias current (0 to 100 mA). [ 44 ] In Figure 4b, we show the wavelength‐dependent temperature‐induced refractive index changes of MMA for different currents. Since the refractive index change depends on temperature, we measured the refractive index of MMA for each current (0 to 100 mA) by annealing the Si/MMA cavity for a time interval of 5 min.…”
Section: Figurementioning
confidence: 99%
“…As for traditional metamaterials, once the structural units are determined, they can only work well at a certain frequency range, which greatly limits their applications in practical engineering. The ever-increasing demand on designing versatile photonic devices inspires the rapid development of tunable metamaterials [31][32][33][34][35]. Several methods have been proposed to broaden their operation bandwidth with the incorporation of active inclusions, such as varactor diodes [36][37][38], semiconductors [39][40][41], ferroelectric [42], phase change materials [43], graphene [44][45][46], and anisotropic materials [47][48][49][50].…”
Section: Introductionmentioning
confidence: 99%