Silicon-Chip Based Electromagnetic Vibration Energy Harvesters Rapidly Fabricated by Wafer-Level Molten Metal Micro-Casting Technique

Han, Ruqi; Wang, Nianying; Xu, Dacheng; Gu, Junfeng; Li, Xinxin

doi:10.1109/mems46641.2020.9056213

Cited by 6 publications

(2 citation statements)

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“…Energy harvesters can be categorized by a generating mechanism such as a piezoelectric (PE) energy harvester [ 8 ], piezo-electromagnetic (PEM) hybrid energy harvester [ 9 ], electrostatic (ES) energy harvester [ 10 , 11 ], electromagnetic (EM) energy harvester [ 12 , 13 , 14 , 15 ], thermoelectric generator (TEG) [ 16 ], triboelectric nanogenerator (TENG) [ 17 ], pyroelectric generator [ 18 , 19 ], thermal radiation pyroelectric generator (PyG) [ 20 , 21 ], etc. Among these energy harvesters, EM energy harvesters can easily convert relative motion between a metal coil and magnet into electronic energy, and the output power density is relatively high.…”

Section: Introductionmentioning

confidence: 99%

“…This paper proposes double-deck three-dimensional (3D) metal solenoids that are fabricated with a silicon-wafer based integration method and can generate much larger power density than single-layer solenoid structure [ 13 ]. A silicon mold for the 3D metal solenoid with double-deck metal coils is firstly fabricated by micro electro mechanical systems (MEMS) techniques including through-wafer deep reactive ion etch (DRIE).…”

Section: Introductionmentioning

confidence: 99%

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Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvester

et al. 2021

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A silicon-chip based double-deck three-dimensional (3D) solenoidal electromagnetic (EM) kinetic energy harvester is developed to convert low-frequency (<100 Hz) vibrational energy into electricity with high efficiency. With wafer-level micro electro mechanical systems (MEMS) fabrication to form a metal casting mold and the following casting technique to rapidly (within minutes) fill molten ZnAl alloy into the pre-micromachined silicon mold, the 300-turn solenoid coils (150 turns for either inner solenoid or outer solenoid) are fabricated in silicon wafers for saw dicing into chips. A cylindrical permanent magnet is inserted into a pre-etched channel for sliding upon external vibration, which is surrounded by the solenoids. The size of the harvester chip is as small as 10.58 mm × 2.06 mm × 2.55 mm. The internal resistance of the solenoids is about 17.9 Ω. The maximum peak-to-peak voltage and average power output are measured as 120.4 mV and 43.7 μW. The EM energy harvester shows great improvement in power density, which is 786 μW/cm3 and the normalized power density is 98.3 μW/cm3/g. The EM energy harvester is verified by experiment to be able to generate electricity through various human body movements of walking, running and jumping. The wafer-level fabricated chip-style solenoidal EM harvesters are advantageous in uniform performance, small size and volume applications.

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