1969
DOI: 10.1109/mspec.1969.5214116
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Silicon-gate technology

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Cited by 78 publications
(14 citation statements)
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“…A prime example is to use the gate of a MOSFET as a mask for defining the source and drain regions by means of ion implantation. 16,17 While most experiments employ electron spin states [5][6][7][8][9][10] to encode quantum information, hole spin qubits 11,18,19 represent an attractive alternative, particularly for large-scale quantum circuits. Hole spins in Si experience a strong spinorbit interaction (SOI), enabling rapid and allelectrical spin control.…”
mentioning
confidence: 99%
“…A prime example is to use the gate of a MOSFET as a mask for defining the source and drain regions by means of ion implantation. 16,17 While most experiments employ electron spin states [5][6][7][8][9][10] to encode quantum information, hole spin qubits 11,18,19 represent an attractive alternative, particularly for large-scale quantum circuits. Hole spins in Si experience a strong spinorbit interaction (SOI), enabling rapid and allelectrical spin control.…”
mentioning
confidence: 99%
“…Initially, metal-oxide semiconductor field effect transistors (MOSFETs) had aluminum gates which were slow, large in area, unreliable, with high leakage currents. Then a self-aligned-gate process arrived in which the gates of the transistors were made with polycrystalline silicon [60], not a metal. The scaling of CMOS technology has accelerated in recent years and will arguably continue toward the 8 nm regime [4].…”
Section: Introductionmentioning
confidence: 99%
“…For decades, semiconductor manufacturers have been shrinking transistor size in ICs to achieve the yearly increases in speed and performance described by Moore's Law, which exists only because the RC delay was negligible in comparison with signal propagation delay [1]. For submicron technology, however, the RC delay becomes a dominant factor [2].…”
Section: Introductionmentioning
confidence: 99%