1991
DOI: 10.1063/1.105338
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Silicon Mach–Zehnder waveguide interferometers based on the plasma dispersion effect

Abstract: Silicon Mach–Zehnder waveguide modulators have been fabricated and operation characterized at the wavelength of 1.3 μm. Device operation is based on the free-carrier-induced change in the refractive index of silicon. Modulation depths of −4.9 dB and response times τresponse<50 ns have been achieved at λ=1.3 μm for an injected carrier density of 6.5×1017 cm−3.

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Cited by 103 publications
(49 citation statements)
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“…The 10%-90% rise (OFF switching) and fall (ON switching) time for the modulated signals in Fig. 4 is about 100 ns, in good agreement with [6]. We can thus estimate the bandwidth of the plasma dispersion effect for these devices to about 3.5 MHz.…”
Section: Measurement Results and Discussionsupporting
confidence: 68%
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“…The 10%-90% rise (OFF switching) and fall (ON switching) time for the modulated signals in Fig. 4 is about 100 ns, in good agreement with [6]. We can thus estimate the bandwidth of the plasma dispersion effect for these devices to about 3.5 MHz.…”
Section: Measurement Results and Discussionsupporting
confidence: 68%
“…2) has been made quasiperiodic in order to avoid possible unwanted multiple reflection of the propagating mode. The diode injected charge is responsible for light phase modulation through the plasma dispersion effect, as stated in [6] among others.…”
Section: Devices Descriptionmentioning
confidence: 99%
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