Silicon monolithic micromechanical gyroscope

Greiff, Paul; Boxenhorn, Burton; King, Tsu‐Jae; Niles, L.

doi:10.1109/sensor.1991.149051

Cited by 109 publications

(51 citation statements)

References 1 publication

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“…high Q factor) and improved frequency stability (Howe 1994). Micro mechanical resonators have been successfully applied to sensors for linear acceleration (Allen et al 1989), angular rotation rate (Greiff et al 1991) and pressure (Thornton et al 1988). Micro mechanical resonators have also been used as an alternative to off chip quartz crystal and SAW resonators for wireless communication (Nguyen 1996).…”

Section: Introductionmentioning

confidence: 99%

Topological design considering flexibility under periodic loads

Nishiwaki

Min

Kikuchi

2000

Structural and Multidisciplinary Optimization

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Topology optimization has been extensively considered to design the structural configuration for the stiffness maximization and the eigenfrequency maximization. In this paper, we construct a topology optimization method implementing flexibility with the time-periodic loading condition. First, the flexibility in the dynamic periodic loading is formulated using the mutual energy concept. Second, the multi-optimization problem is formulated using a new multi-objective function in order to obtain an optimal solution incorporating both flexibility and stiffness. Next, the topology optimization procedure is developed using the homogenization design method. Finally, some examples are provided to confirm the optimal design method presented here.

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Section: Introductionmentioning

confidence: 99%

Topological design considering flexibility under periodic loads

Nishiwaki

Min

Kikuchi

2000

Structural and Multidisciplinary Optimization

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“…To compare the sensitivity, we may assume the two topologies have the same resonant frequencies and same spring constants for the drive modes. Thus, the sensitivity ratio of the two competing topologies is (6) Typically, m, m and . For the vertical sense topology, the drive motion is along the longitudinal direction of the comb fingers, so a vibration amplitude of 20 m or more can be achieved.…”

Section: B Choosing Between Vertical Actuation and Sensingmentioning

confidence: 99%

“…Most of MEMS gyroscopes are vibratory type that is more suitable for microfabrication processes. The first silicon micromachined vibratory gyroscope was proposed by Draper Lab in 1986 [5], [6]. After that, various fabrication technologies, structural designs and drive/sense mechanisms have been investigated.…”

Section: Introductionmentioning

confidence: 99%

Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope

Xie

Fedder

2003

IEEE Sensors J.

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“…A number of silicon micromachined vibratory microgyroscopes have been widely developed due to the merits of low cost, small size and compatibility with IC process (1), (2) . The basic principle employed in the vibratory microgyroscope is the Coriolis acceleration effect (1), (3) .…”

Section: Introductionmentioning

confidence: 99%

Robust Design of a Decoupled Vibratory Microgyroscope Considering Over-Etching as a Fabrication Tolerance Factor

Jeong

Kim

2006

JSME Int. J., Ser. A

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A robust optimal design of a bulk-micromachined, decoupled vibratory microgyroscope was carried out to determine geometric dimensions such that the gyroscopic performance is least affected by a fabrication tolerance. Electro-mechanical vibration analysis considering the sensing electrodes and the electronic signal processing were performed to obtain the frequency responses that influence the gyroscopic performance. A statistically distributed lateral over-etching (LOE) developed in the fabrication process was selected as a fabrication tolerance factor. The dimensions of the driving and sensing spring are selected as design variables which are the sum of deterministic mask dimensions and the LOE. To minimize the influence of LOE on the decoupled vibratory microgyroscope performance, the multi-objective function was formulated so as to minimize the sensitivities of the frequency difference with respect to the LOE. As a result, the standard deviation of the frequency difference and the driving natural frequency are reduced to 78% and 8%, respectively, through the Monte Carlos Simulation (MCS).

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Silicon monolithic micromechanical gyroscope

Cited by 109 publications

References 1 publication

Topological design considering flexibility under periodic loads

Topological design considering flexibility under periodic loads

Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope

Robust Design of a Decoupled Vibratory Microgyroscope Considering Over-Etching as a Fabrication Tolerance Factor

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