Silicon nanomembranes for fingertip electronics

Abstract

We describe the use of semiconductor nanomaterials, advanced fabrication methods and unusual device designs for a class of electronics capable of integration onto the inner and outer surfaces of thin, elastomeric sheets in closed-tube geometries, specially formed for mounting on the fingertips. Multifunctional systems of this type allow electrotactile stimulation with electrode arrays multiplexed using silicon nanomembrane (Si NM) diodes, high-sensitivity strain monitoring with Si NM gauges, and tactile sensing with elastomeric capacitors. Analytical calculations and finite element modeling of the mechanics quantitatively capture the key behaviors during fabrication/assembly, mounting and use. The results provide design guidelines that highlight the importance of the NM geometry in achieving the required mechanical properties. This type of technology could be used in applications ranging from human-machine interfaces to 'instrumented' surgical gloves and many others.

Stretchable silicon nanoribbon electronics for skin prosthesis

“…Single crystalline silicon strain gauges on soft elastomer exhibit a linear relationship between strain and relative resistance changes with fast response times 21 . These sensors have been previously utilized to detect motion across various anatomical locations, such as the wrist 22 and fingers 23 . In addition, stretchable metal and single crystalline silicon temperature sensors 12,24 fabricated on ultrathin substrates have been applied for temperature monitoring on human skin.…”

Shapeable magnetoelectronics

“…Electronic skin on fingertips 185,186 is especially attractive for precise input and as communication interfaces due to our finger's fine motor skills. In Figure 24, an on-skin magnetic proximity sensor is demonstrated where a single imperceptible GMR element is attached to a fingertip and connected to a read out circuit.…”

Reconfigurable systems for multifunctional electronics

“…Integrating various modules into a single system provides a platform for continuous monitoring of health condition, 82 augmented surgical procedures, 83 and human-machine interfaces. 84 A bio-integrated electronic device that includes LED, 85 antenna, and a variety of different sensors (e.g., temperature, 86 strain, 87 and electroencephalogram/electrocardiogram/electromyogram 88,89 ) is demonstrated in a form of a soft, epidermal tattoo 90 (Fig.…”