Silicon nitride nanostructures prepared by reactive sputtering using closed-field unbalanced dual magnetrons

Abstract

In this work, silicon nitride nanostructures were prepared by a reactive sputtering technique employing, a novel design of closed-field unbalanced dual magnetron system. The optical properties of the prepared nanostructures were studied by their absorption and transmission spectra in the range of 200-800 nm. As well, the structural properties of these structures were studied to determine the optimum geometry of the employed closed-field unbalanced dual magnetron configuration. The produced Si 3 N 4 nanostructures showed high absorption in the ultraviolet wavelength region (<200 nm) in addition to an absorption band centered at 389 nm. The energy gap of the prepared samples was found to be 5.2 eV of allowed and direct type. Structural results showed that the prepared samples were amorphous with average particle size of 20-30 nm, average particle diameter of 99.22 nm and average roughness of 0.777 nm. In this technique, low cost, high purity and homogeneous surfaces can be prepared by the effective control of the operation parameters, especially the geometry of closed-field unbalanced dual magnetron configuration.

Production of nanopowders from physical vapor deposited films on nonmetallic substrates by conjunctional freezing-assisted ultrasonic extraction method

“…As well, the particle density for the films prepared by MS is extremely homogeneous when compared to other physical vapor deposition methods. [28][29][30][31][32] PLD exhibited rather lower quality than MS but reasonably better than other methods and techniques. The PLD cannot be replaced by MS for some industrially important materials, such as alumina (Al 2 O 3 ).…”

“…[13][14][15][16][17][18][19][20][21][22][23][24][25] In this work, a new technique to extract nanopowders from thin films deposited on nonmetallic substrates by physical vapor deposition methods and techniques. [26][27][28][29][30][31][32][33][34][35][36][37][38]…”

Detection of gain enhancement in laser-induced fluorescence of rhodamine B lasing dye by silicon dioxide nanostructures-coated cavity

“…Before using them in sputtering experiments, these cells were first cleaned with ethanol to remove any oil layers or residuals may exist on their surfaces, which should be rinsed and washed with distilled water to remove ethanol, and then dried completely before being kept in clean case or placed inside the vacuum chamber. More details on the deposition system can be found in previous works [33,34].…”

Detection of laser-produced tin plasma emission lines in atmospheric environment by optical emission spectroscopy technique

“…A pulsed laser source is employed to vaporize and excite the analyte forming plasma [4]. The optical emission from the relaxation of excited species within the plasma yields information regarding the composition of the material under test [5][6][7].…”