Silicon‐on‐insulator‐based microsolid propellant thruster array

Abstract

A silicon-on-insulator (SOI)-based microelectromechanical system solid propellant thruster array is presented. The micronozzle layer and microigniter layer of the array are formed on both surfaces of the SOI wafer, respectively. The layout design rules can properly distribute the heat produced by the microigniter below the solid propellant inside the chamber. Test results show that the highest temperature of the microigniter is located under the propellant. When one unit in the array is ignited by a DC voltage of 7.9 V, other units around it are not ignited. Moreover, the ignition resistors can work again, which means that the array can be used repeatedly when the solid propellant is refilled.