2011 13th International Conference on Transparent Optical Networks 2011
DOI: 10.1109/icton.2011.5970854
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Silicon on insulator photonic integrated sensors: On-chip sensing and interrogation

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Cited by 4 publications
(3 citation statements)
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“…Silicon-on-insulator (SOI) technology has emerged as a focus platform for integrated photonics, with complementary metal-oxide semiconductor (CMOS) production lines, opening the possibility of mass fabrication [5]. Silicon is the commonly used material in MEMS, and we have shown the possibility of micromachining postprocessing of SOI photonic integrated circuits [6]. Strong lateral confinement of the light due to the high refractive index contrast of SOI waveguides (Δn ≈ 2) allows for small device footprint, but also comes with high sensitivity to the exact behavior of the modes in the waveguide, e.g., strong modal dispersion [7,8].…”
mentioning
confidence: 99%
“…Silicon-on-insulator (SOI) technology has emerged as a focus platform for integrated photonics, with complementary metal-oxide semiconductor (CMOS) production lines, opening the possibility of mass fabrication [5]. Silicon is the commonly used material in MEMS, and we have shown the possibility of micromachining postprocessing of SOI photonic integrated circuits [6]. Strong lateral confinement of the light due to the high refractive index contrast of SOI waveguides (Δn ≈ 2) allows for small device footprint, but also comes with high sensitivity to the exact behavior of the modes in the waveguide, e.g., strong modal dispersion [7,8].…”
mentioning
confidence: 99%
“…Distinct read-outs systems can be used depending on the application. For example, for wavelength meter devices, 3 × 3 interferometers are employed to track the input device wavelength [ 25 ]. Although this is not the goal of the IOSS device, it can help us to acquire more accurate information by means of measuring multiple points at the output.…”
Section: Device Designmentioning
confidence: 99%
“…SOI is a mature, CMOS-compatible, viable technology for the implementation of compact, cost-effective, versatile MRR-based optical filters for a wide range of applications, including telecom/datacom [30], microwave photonics [18], and sensing [31]. SOI-based MRR can be designed to operate as either a band-pass or a band-rejecting filter.…”
Section: Performance Evaluation On the Feasibility Of Mrrs For Submentioning
confidence: 99%