Silicon Oxide‐Rich Diamond‐Like Carbon: A Conformal, Ultrasmooth Thin Film Material with High Thermo‐Oxidative Stability

Mangolini, Filippo; McClimon, J. Brandon; Segersten, Justin; Hilbert, James; Heaney, Patrick J.; Lukes, Jennifer R.; Carpick, Robert W.

doi:10.1002/admi.201801416

Cited by 15 publications

(6 citation statements)

References 58 publications

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“…[37] Sliding tests were performed on an a-C:H:Si:O lm custom-grown by NCD Technologies (Madison, WI) on a Si wafer using the plasma immersion ion implantation and deposition method, as described previously . [22] The RMS roughness of the a-C:H:Si:O was 0.16 nm across 1x1 µm 2 , as measured with AFM. [22] AFM measurements were conducted in either dry nitrogen (< 5% RH) or humid nitrogen (50 ± 5%RH), controlled by continuous ow of nitrogen from the boiloff of a liquid nitrogen dewar, with some fraction bubbled through deionized water to provide humidity when needed.…”

Section: Experimental Methodologymentioning

confidence: 83%

“…[22] The RMS roughness of the a-C:H:Si:O was 0.16 nm across 1x1 µm 2 , as measured with AFM. [22] AFM measurements were conducted in either dry nitrogen (< 5% RH) or humid nitrogen (50 ± 5%RH), controlled by continuous ow of nitrogen from the boiloff of a liquid nitrogen dewar, with some fraction bubbled through deionized water to provide humidity when needed.…”

Section: Experimental Methodologymentioning

confidence: 83%

“…This work focuses on the formation of tribo lm in a DLC system using a microscale contact. The speci c system is a silicon oxide-doped hydrogenated amorphous carbon (a-C:H:Si:O) which has been characterized spectroscopically, [22] and studied in nanoscale [23] and macroscale [18] sliding experiments. In macroscale tribometer experiments of a steel ball sliding against a-C:Si:O, stable tribo lms formed readily and low friction coe cients (µ = 0.05-0.2) were observed.…”

Section: Introductionmentioning

confidence: 99%

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In situ Growth and Characterization of Lubricious Carbon-Based Films Using Colloidal Probe Microscopy

et al. 2023

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Silicon oxide-doped hydrogenated amorphous carbon (a-C:H:Si:O) is an important form of diamond like carbon (DLC) for tribological applications, primarily because of its enhanced thermal stability and reduced dependence of friction on environmental humidity. As with other DLCs, its mechanisms of lubrication are still an active area of research, though it is now known that surface passivation and tribo lm growth are important factors. In this study, tribo lm formation for a-C:H:Si:O is examined at the microscale by using steel colloid atomic force microscopy probes as the sliding counterface. This approach provides some inherent advantages over macroscale tribology experiments, namely that the tribo lm thickness and stiffness can be tracked in situ and correlated directly with the friction response. The results of these experiments show that the tribo lm grows rapidly on the steel colloid following a period of counterface wear and high friction. The friction drops more than 80% upon nucleation of the tribo lm, which is attributed to a decrease of more than 80% in adhesion combined with a decrease in the estimated interfacial shear strength of at least 65%. Approximately 80% of the friction decrease occurs before the tribo lm reaches a thickness of 2 nm, suggesting that only the near-surface properties of the tribo lm provide the needed functionality for its effective lubrication mechanisms.

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Section: Experimental Methodologymentioning

confidence: 83%

Section: Experimental Methodologymentioning

confidence: 83%

Section: Introductionmentioning

confidence: 99%

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In situ Growth and Characterization of Lubricious Carbon-Based Films Using Colloidal Probe Microscopy

et al. 2023

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“…DLC (diamond-like carbon) film is a kind of the functional coating in the applications of tribology, electronics, chemics, etc. [1][2][3][4][5]. In the infrared field, the hard DLC film can be also used as the protective and anti-reflective film [6][7][8][9], because of its low optical absorption in the MIR (medium infrared) band of 3∼5 μm.…”

Section: Introductionmentioning

confidence: 99%

Optical properties of diamond-like carbon films prepared by pulsed laser deposition onto 3D surface substrate

Huang

Wang

et al. 2020

Surface Engineering

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It is difficult to grow uniform film by pulsed laser deposition because the spatial distribution of the laser-induced plume is a forward-directed cone-shape. A 3D-motional deposition setup was founded, and the correlative mathematical model of the film thickness on the 3D curved surface was deduced. Based on simulation and optimization, the diamond-like carbon (DLC) film was grown onto the large curved silicon substrate. According to the infrared transmittance spectra, the optical constants of the DLC film samples at different regions on the curved substrate were similar, indicating that the DLC film prepared onto the curved surface was homogeneous. Meanwhile, the deviation of average transmittance in the medium infrared band was below 2.3%, which could improve the imaging performance of the infrared detection. This research is useful to expand the application of the pulsed laser deposition in the optical field.

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“…Silicon oxide (silica) phases, SiO x have a surprisingly diverse application area including electronics, photovoltaics, medicine, and house construction . For example, SiO x is a constituent of cement, glass, medicines, toothpaste, transistors, and solar cells.…”

Section: Introductionmentioning

confidence: 99%

Observation of Crystalline Oxidized Silicon Phase

Kuzmin

Lehtiö

Mäkelä

et al. 2019

Adv Materials Inter

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Silica phases, SiOx forming at surfaces of various silicon crystals, e.g., Si wafers, nanowires, and nanoparticles via Si oxidation are key building blocks of diverse applications in the fields of electronics, medicine, and photonics for instance. The Si oxidation has been established to produce amorphous SiOx films, and the resulting oxide/silicon structures are prototypical junctions or contacts of amorphous and crystalline materials of which formation and properties have been extensively studied to understand and develop functionality of SiOx/Si in the applications. Here, observation of hitherto undiscovered phase of the SiOx/Si material, which is crystalline without traditional amorphous silica, is presented. The crystalline SiOx/Si structures are produced in vacuum environment via controlled oxidations of Si where O atoms are incorporated beneath the topmost Si layer. Concomitantly some Si atoms are detached from the crystal, and diffuse to the topmost surface, consistent with previous theoretical predictions, retaining still a pure Si‐surface type reconstruction and leading to a crystalline stack of Si/SiOx/Si. In addition to providing a well‐defined platform to studies of the SiOx/Si system, the found crystalline phase is also hypothesized to decrease amounts of disorder‐induced defects in the applications. Presented electrical characterization via carrier‐lifetime and capacitor measurements support the hypothesis.

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Silicon Oxide‐Rich Diamond‐Like Carbon: A Conformal, Ultrasmooth Thin Film Material with High Thermo‐Oxidative Stability

Cited by 15 publications

References 58 publications

In situ Growth and Characterization of Lubricious Carbon-Based Films Using Colloidal Probe Microscopy

In situ Growth and Characterization of Lubricious Carbon-Based Films Using Colloidal Probe Microscopy

Optical properties of diamond-like carbon films prepared by pulsed laser deposition onto 3D surface substrate

Observation of Crystalline Oxidized Silicon Phase

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