Phys. Rev. Lett.
 2023
DOI: 10.1103/physrevlett.130.081403
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Silicon Oxy-Nitride for the Low Refractive Index Layers in the Mirror Coatings of the Cryogenic Laser Interferometer Gravitational Waves Detector

S. Chao
1
,
Wen-Jie Tsai2,
Dong-Lin Tsai3
et al.
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