1996
DOI: 10.1016/0927-0248(95)00092-5
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Silicon oxynitride multilayers as spectrally selective material for passive radiative cooling applications

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Cited by 45 publications
(16 citation statements)
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“…In the present work, we focus our attention on the glassy dielectrics that are widely used in silicon integrated electronics, silicon nitride and silicon oxynitride. Their most prominent applications are: protective dielectric layers in certain microelectronic devices [1], antireflection coatings for silicon photovoltaics [2,3] and germanium solar cells [4], spectrally selective materials for remote sensing of the thermal performance of the object, and for passive radiative cooling [5][6][7]. In many of these applications the IR spectral region plays an important role.…”
Section: Introductionmentioning
confidence: 99%
“…In the present work, we focus our attention on the glassy dielectrics that are widely used in silicon integrated electronics, silicon nitride and silicon oxynitride. Their most prominent applications are: protective dielectric layers in certain microelectronic devices [1], antireflection coatings for silicon photovoltaics [2,3] and germanium solar cells [4], spectrally selective materials for remote sensing of the thermal performance of the object, and for passive radiative cooling [5][6][7]. In many of these applications the IR spectral region plays an important role.…”
Section: Introductionmentioning
confidence: 99%
“…The temperature of the 6.5-µm-thick film and 13.5-µm-thick film achieved an average 0.82 • C and 0.44 • C temperature drop below the ambient air temperature. A similar study using silicon oxynitride was conducted by Diatezua et al [62] and a sub-ambient temperature was predicted. SiO 2 and SiC are also candidates for radiative cooling as their phonon resonances lead to high IR emission.…”
Section: Selective Coolersmentioning
confidence: 68%
“…Some other materials including polyvinyl-fluoride plastic film and silicon monoxide film on aluminum also show good performance as selective emitters [3][4]. The second approach is to use periodic nanostructures [5][6][7][8][9] including photonic crystals and metamaterials due to the advancements of fabrication technologies in recent years. A daytime radiative cooler was proposed to have a good cooling performance by numerical simulation [8].…”
Section: Introductionmentioning
confidence: 99%