2011
DOI: 10.1109/jstqe.2010.2090343
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Silicon Photodiodes in Standard CMOS Technology

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Cited by 20 publications
(9 citation statements)
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“…The reverse bias voltage could only increase to a certain limit depending on the technology in order not to jeopardize the remaining circuitry. A countless number of publications are available dealing with modified PD structures; several recently published papers should be mentioned at this point [10]- [17]. As a common outcome in those papers, either a second PD for collecting the diffusive carriers or a third layer (in most cases a deep N-well) for blocking the diffusion current generated in the deep silicon bulk were used.…”
Section: Pin Photodiodementioning
confidence: 99%
“…The reverse bias voltage could only increase to a certain limit depending on the technology in order not to jeopardize the remaining circuitry. A countless number of publications are available dealing with modified PD structures; several recently published papers should be mentioned at this point [10]- [17]. As a common outcome in those papers, either a second PD for collecting the diffusive carriers or a third layer (in most cases a deep N-well) for blocking the diffusion current generated in the deep silicon bulk were used.…”
Section: Pin Photodiodementioning
confidence: 99%
“…2 The quantum efficiency (QE) of this photodiode is found to be 15%, which is a typical number for the n+/p-well diode realized in the CMOS logic process. 28) A dark current level is also extracted by measurement of the 3T APS test circuit.…”
Section: Photodiode Characteristicsmentioning
confidence: 99%
“…Its desirable multiplication properties have also motivated its use as the multiplier material for infrared heterojunction APDs, such as Ge-on-Si [11]- [13], [16], or GeSn-on-Si [17] photodetectors. Other advantages of siliconbased APDs (SiAPDs) include monolithic integration with read-out integrated circuitry and compatibility with the CMOS fabrication infrastructure [18], [19], which promote high yield and high pixel densities [20].…”
Section: Introductionmentioning
confidence: 99%