Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics

Abstract

Solid state beam steering devices are key elements in low cost, robust, and three-dimensional imaging systems. Here, we present a silicon photonic beam steering device based upon an 8 × 8 grating coupler focal plane array approach fed by a thermo-optic Mach-Zehnder switching tree. In this device, transmission of light from the grating couplers is made through the backside of the chip using topside mirrors allowing for both high-efficiency out-coupling and direct flip-chip integration of drive electronics, providing a path to scale to denser focal plane arrays with large numbers of points in the future. A −13.8 dB fiber-to-fiber transmission was achieved in our preliminary test around 1523 nm for the beam steering chip.

Ge Ion Implanted Photonic Devices and Annealing for Emerging Applications

“…It has also started to play a significant role in many other applications, including chemical and biomedical sensing, LiDAR application in driving assistance systems, and in applications for building quantum networks. The integration with III-V light source materials such as indium phosphide through bonding has also been reported to solve the lack of intrinsic light emission within the silicon platform [1][2][3][4][5][6][7][8][9].…”