Silicon photonic waveguide metrology using Mach-Zehnder interferometers

Otón, Claudio J.; Manganelli, C. L.; Bontempi, F.; Fournier, Maryse; Fowler, Daivid; Kopp, Christophe

doi:10.1364/oe.24.006265

Cited by 18 publications

(12 citation statements)

References 11 publications

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“…This is mostly caused by the unavoidable fluctuations of the silicon thickness due to foundry level non‐uniformities or variations in the waveguide width and slab thickness due to slightly different processing conditions. SOI wafers have typical silicon thickness variations of a few nanometers over the wafer, while waveguide width variations can be much larger. As an example, waveguide width variations as large as 15 nm over the wafer were measured in ref.…”

Section: Resultsmentioning

confidence: 99%

“…As an example, waveguide width variations as large as 15 nm over the wafer were measured in ref. [].…”

Section: Resultsmentioning

confidence: 99%

“…The technique to estimate the factors contributing to the spread in resonance wavelength is described in ref. []. Using this approach, the waveguide width variation is identified to be the main cause of the wafer‐level non‐uniformity of resonance wavelength and is estimated to be 15 nm.…”

Section: Resultsmentioning

confidence: 99%

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PWM‐Driven Thermally Tunable Silicon Microring Resonators: Design, Fabrication, and Characterization

Pintus

Hofbauer

Manganelli

et al. 2019

Laser & Photonics Reviews

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Ring resonators are one of the fundamental building blocks of advanced integrated optical circuits. They find applications as nonlinear optical elements, filters, sensors, and switches among others. Here, a comprehensive optimization framework and experimental results of thermally tunable microring resonators in silicon photonics is presented, with a focus on standard silicon photonic foundry processes. In order to minimize the total power consumption, the ring resonators are tuned by applying a pulse‐width‐modulated electrical signal to the heaters. The thermal performance of integrated silicon and metal heaters are investigated and compared using an effective model validated by the measurement results. The heater power consumption is minimized by optimizing heater cross section, resistance, and metal contact configurations. Using the multiproject wafer run developed at CEA‐LETI, it is demonstrated that a metal heater provides 30% lower power consumption compared to an integrated silicon one, reaching a power consumption of 27.53 mW per free spectral range. The measurements are in excellent agreement with the theoretically predicted thermal performance, with a deviation as low as 5%. The proposed framework, supported by the experimental results, will serve as a design guideline set that can be easily adapted for other thermo‐optic switches in future silicon photonic applications.

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Section: Resultsmentioning

confidence: 99%

“…As an example, waveguide width variations as large as 15 nm over the wafer were measured in ref. [].…”

Section: Resultsmentioning

confidence: 99%

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PWM‐Driven Thermally Tunable Silicon Microring Resonators: Design, Fabrication, and Characterization

Pintus

Hofbauer

Manganelli

et al. 2019

Laser & Photonics Reviews

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“…A schematic of the interleaving stage, before and after the optimization, is shown in the bottom panels of Figure 2. The MZI interleavers are very sensitive to the fabrication errors and need a dedicated trimming to allow the optical signal properly entering the cross-bar matrix [24]. In this case, the optical source (tunable laser) was injected at the interleaver input and was swept over the wavelength, within an interval of 200 GHz, i.e., one channel width.…”

Section: (Upper Panels)mentioning

confidence: 99%

Automatic Initialization Methods for Photonic Components on a Silicon-Based Optical Switch

et al. 2019

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In this work we showed the optimization of the spectral response of several optical elements in a silicon-based optical switch. Integrated thermal resistors induced a local heating of the components. The temperature increase, in turn, caused a thermal shift of the optical response of the component. In this manner, we aligned interleavers and micro-ring resonators to the International Telecommunication Union (ITU) channels, by using a stochastic method named Globalized Bounded Nelder-Mead (GBNM) to determine the proper temperatures. The optimization engine relied on the optical feedback from on-chip monitor photodiodes to drive these photonic elements into the wanted functioning condition. This method is suited for restoring the spectral response of optical elements impaired by fabrication inaccuracies. In the same way, it can be applied to tune in resonance active components, whose transfer function has one or more local optima. We proved the reliability of the GBNM method for the optimization of an integrated optical switch, with more than thousand optical components, each one interfaced with a thermal resistor driven by a dedicated electronic circuit. On the one hand, the GBNM guaranteed the automatic alignment of all active components on the chip, over multiple instances. On the other hand, the method allowed for the proper working of such a complex device.

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“…While SOI wafers have typical silicon thickness variations of a few nm over the full wafer, on the other hand the waveguide width variations can be much larger. As an example, a variation of up to 15 nm in the waveguide width over the wafer is measured in [27]. Fabrication errors, once calibrated, can be compensated by varying the UV exposure within the wafer.…”

Section: System-level Analysismentioning

confidence: 99%

Low-Power-Consumption Integrated Tunable Filters for WDM Switching Applications in Silicon Photonics

Manganelli

Velha

Pintus

et al. 2018

IEEE Photon. Technol. Lett.

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We present the experimental results of thermally tunable double microring resonator devices for integrated wavelength division multiplexing applications. The devices demonstrated a free-spectral range up to 2.4 THz (19.2 nm) around 1550 nm and a channel rejection higher than 35 dB. Using Ti/TiN metal heaters, a power consumption of 20 mW per FSR per ring is achieved, which outperformed analogous devices fabricated using the standard silicon process. A thermal tuning efficiency of 0.95 nm/mW is accomplished, and a symmetric tuning is obtained with less than 1% of electrical compensation.

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Silicon photonic waveguide metrology using Mach-Zehnder interferometers

Cited by 18 publications

References 11 publications

PWM‐Driven Thermally Tunable Silicon Microring Resonators: Design, Fabrication, and Characterization

PWM‐Driven Thermally Tunable Silicon Microring Resonators: Design, Fabrication, and Characterization

Automatic Initialization Methods for Photonic Components on a Silicon-Based Optical Switch

Low-Power-Consumption Integrated Tunable Filters for WDM Switching Applications in Silicon Photonics

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