“…Among a variety of MEMS-based neural probes with diverse geometries, materials, and fabrication techniques, the “Utah” and “Michigan” probe types illustrated in Figure 1 B have been most widely used as the standard architecture of microfabricated intracortical arrays [ 77 , 78 , 79 , 80 , 81 , 82 , 83 , 84 , 85 , 86 , 87 ]. Various types of flexible cortical electrode arrays have been demonstrated based on biocompatible polymers such as polyimide, silicone elastomers, parylene or liquid crystal polymers (LCPs) [ 88 , 89 , 90 , 91 ].…”