Silicon resonant angular rate sensor using electromagnetic excitation and capacitive detection

Abstract

A new silicon resonant angular rate sensor is presented. The sensor consists of a packaged glass-silicon-glass structure and is made by a batch-fabrication process. The sensor is a tuning fork with both sides suspended by torsion bars. Electromagnetic excitation and capacitive detection are used. The applied angular rate generates the Coriolis' force and the resonator starts torsional vibration around the torsion bars. The test device shows a sensitivity of 0.7 fF seddeg. In this paper, the working principles, fabrication process, and simulated and measured outputs of the sensor are described. The scaling rule of the angular rate sensor are also considered.

Microsystem Technology and Microrobotics

“…The following described silicon sensor was produced using a batch fabrication method [Hash94]. Conventional sensors using piezoelectric resonators or optical glass fibers are very sensitive, but are usually expensive.…”

“…The following described silicon sensor was produced using a batch fabrication method [Hash94]. According to [Hash94] A 200 ~-tm thick tuning fork arrangement made of (110) silicon is used as the resonator. Fig.…”

Development of SAW based gyroscope with high shock and thermal stability

“…Almost all of the reported MEMS gyroscopes utilize this Coriolis force to measure the angular velocity of a spinning disc. Other types of gyroscopes exist, such as fiber optic gyroscopes, ring laser gyroscopes, and conventional rotating wheel gyroscopes, but these are too expensive and too large for use in most emerging applications [1][2][3][4][5]. In recent years, MEMS gyroscopes have received a great deal of attention for use in automobile safety systems, image stabilization, body movement monitoring, and smart weapons systems applications, because these devices provide a small size, high sensitivity, a low power consumption, and an easy integration with current CMOS electronics.…”

Piezoelectric based resonant mass sensor using phase measurement

“…A variety of resonant sensors have been investigated and some of them have been commercialized. However, so far resonant sensors are rarely seen among commercial sensor products due to possibly, the complexity of operation electronics and the design aspect considered for high quality factor [2]. Resonant sensors sensitive to mass can be seen in [3,4].…”