Siloxane-functionalised surface patterns as templates for the ordered deposition of thin lamellar objects

Hoffmann, Julian; Gamboa, Sofía Madrigal; Hofmann, Andreas; Gliemann, Hartmut; Welle, Alexander; Wacker, Irene; Schröder, Rasmus R.; Ness, Len; Hagenmeyer, Veit; Gengenbach, Ulrich

doi:10.1038/s41598-019-54507-1

Cited by 6 publications

(12 citation statements)

References 21 publications

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“…These exceptional properties result from the highly flexible siloxane (Si–O–Si) backbone that imparts a high degree of molecular mobility and one of the lowest glass transition temperatures found among polymers ( T g < −100 °C). − These materials have found application as insulating layers in microelectronics, , pore sealings, thin-film encapsulation layers, antifouling coatings for membranes, , bioinert materials in biocompatible coatings, − and barriers . The surfaces functionalized with patterned hydrophobic siloxane thin films have been utilized as templates for an ordered deposition of thin lamellar objects …”

Section: Introductionmentioning

confidence: 99%

Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

Ashurbekova

Šarić

et al. 2021

Chem. Mater.

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Molecular layer deposition (MLD) is a powerful vapor phase approach for growing thin polymer films with molecular-level thickness control. We applied the ring-opening MLD process to deposit a siloxane-alumina hybrid organic–inorganic thin film using tetramethyl-tetravinylcyclotetrasiloxane (V4D4) and trimethylaluminum (TMA) as precursors. In situ studies of this process with a quartz crystal microbalance (QCM) showed a linear mass increase with the number of MLD cycles within a processing temperature window between 120 and 200 °C. The QCM study also revealed self-limiting surface chemistry. A growth per cycle of 1.4 and 1.6 Å and a density of 1.9 and 2.2 g cm–3 were determined by X-ray reflectivity (XRR) for the V4D4/TMA film deposited at 150 and 200 °C, respectively. X-ray photoelectron spectroscopy (XPS), attenuated total reflectance Fourier transform infrared spectroscopy (ATR-FTIR), and in situ QCM were employed to analyze the structural changes and composition of the film. High-resolution transmission electron microscopy (HRTEM) was used to confirm the conformality of the obtained coatings. The grown siloxane-alumina film, even as thin as 12 nm, showed an extremely low leakage current density (lower than 5.1 × 10–8 A cm– 2 at ± 2.5 MV cm–1), a dielectric constant (k) of 4.7, and a good thermal stability after one-hour annealing in air at 1100 °C. The obtained highly conformal and thermally stable siloxane-alumina insulating film can be used as a component of field-effect transistors, flash memories, and capacitors in modern electronic systems.

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Section: Introductionmentioning

confidence: 99%

Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

Ashurbekova

Šarić

et al. 2021

Chem. Mater.

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“…Because of this limitation, a surface functionalized with a hydrophobic self-assembled monolayer (SAM) can be used instead of a photoresist as a template. The SAM provides a high contrast in wettability between the pattern and the surrounding substrate area and allows confinement of assembly solely within the patterned hydrophilic areas. ,, The detailed process of functionalizing the substrate with a SAM can be found in previously published articles. − Currently, the fast fluidic assembly process is mostly used to fabricate patterns with dimensions in millimeter or submillimeter scale. − This is because the viscous force from the substrate diminishes with the dimensions of the pattern. , Li et al enhanced the surface adhesion force through photoirradiation and chemical polarization treatments to the substrate. As a result, a submicrometer (600 nm) resolution was achieved (Figure b).…”

Section: Fluidic Flow-directed Assemblymentioning

confidence: 99%

“… 250 , 295 , 296 The detailed process of functionalizing the substrate with a SAM can be found in previously published articles. 297 − 299 Currently, the fast fluidic assembly process is mostly used to fabricate patterns with dimensions in millimeter or submillimeter scale. 300 − 302 This is because the viscous force from the substrate diminishes with the dimensions of the pattern.…”

Section: Fluidic Flow-directed Assemblymentioning

confidence: 99%

Directed Assembly of Nanomaterials for Making Nanoscale Devices and Structures: Mechanisms and Applications

2022

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Nanofabrication has been utilized to manufacture one-, two-, and threedimensional functional nanostructures for applications such as electronics, sensors, and photonic devices. Although conventional silicon-based nanofabrication (top-down approach) has developed into a technique with extremely high precision and integration density, nanofabrication based on directed assembly (bottom-up approach) is attracting more interest recently owing to its low cost and the advantages of additive manufacturing. Directed assembly is a process that utilizes external fields to directly interact with nanoelements (nanoparticles, 2D nanomaterials, nanotubes, nanowires, etc.) and drive the nanoelements to site-selectively assemble in patterned areas on substrates to form functional structures. Directed assembly processes can be divided into four different categories depending on the external fields: electric field-directed assembly, fluidic flowdirected assembly, magnetic field-directed assembly, and optical field-directed assembly. In this review, we summarize recent progress utilizing these four processes and address how these directed assembly processes harness the external fields, the underlying mechanism of how the external fields interact with the nanoelements, and the advantages and drawbacks of utilizing each method. Finally, we discuss applications made using directed assembly and provide a perspective on the future developments and challenges.

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“…This procedure is known as silanization, an effective coating method to modify material surfaces that are rich in hydroxyl groups, like the outer molecular layer of glass. Molecular bonds are formed by the hydrolysis of silanes/siloxanes and condensation with OH – groups on the substrate surface . Silanization allows for a wide range of contact angles by adjusting the treatment parameters, such as the treatment time and type of silane …”

Section: Introductionmentioning

confidence: 99%

Systematic Study of Wettability Alteration of Glass Surfaces by Dichlorooctamethyltetrasiloxane Silanization─A Guide for Contact Angle Modification

Vukovic,

Røstad,

Farooq

et al. 2023

ACS Omega

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To investigate the effects of wettability on multiphase flow in porous media, glass bead packs or micromodels are commonly used. Their wettability can be altered by the surface treatment method−silanization. Although silanization is widely used for glass wettability modification, comparable systematic approaches over a large range of geometries, treatment conditions, and measurement systems are scarce. In this work, dichlorooctamethyltetrasiloxane (Surfasil) treatment was systematically investigated, resulting in a guide for achieving a wide range of contact angles. Initially, the influence of the Surfasil solvent, treatment time, and Surfasil-to-solvent ratio was investigated on glass plates using the sessile drop method. By varying these variables, it was possible to achieve a wide range of comparable, repeatable, and stable contact angles, from approximately 20−95°for air−water systems. Due to the linear increase of contact angle with larger Surfasil exposure, either due to the time or concentration, contact angle tuning is possible until the critical point. Beyond the critical point of exposure, a system-specific plateau value is reached, independent of the approach. After establishing a clear relationship between the parameters and contact angles, the same treatment parameters were applied to single beads, micromodels, and beadpacks with heptane as the chosen solvent. Optical image analysis was used for the microchips, and micro CT data analysis was used for the bead packs. The treatment appeared to be transferable to all geometries, resulting in similar wetting conditions within the limitations of the measurements. It is concluded that a glass plate can be used as an analogue for obtaining the contact angle alteration trends for more complex porous media with similar compositions. Data analysis methods and surface roughness could have an effect on the obtained contact angle spread.

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Siloxane-functionalised surface patterns as templates for the ordered deposition of thin lamellar objects

Cited by 6 publications

References 21 publications

Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

Directed Assembly of Nanomaterials for Making Nanoscale Devices and Structures: Mechanisms and Applications

Systematic Study of Wettability Alteration of Glass Surfaces by Dichlorooctamethyltetrasiloxane Silanization─A Guide for Contact Angle Modification

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